3/8/2010	10:25:03 AM	Program started normally
3/8/2010	10:25:03 AM	Helium valve closed
3/8/2010	10:25:03 AM	H2 valve closed
3/8/2010	10:25:03 AM	BCl3 valve closed
3/8/2010	10:25:03 AM	PH3 valve closed
3/8/2010	10:25:03 AM	SiCl4 pre valve closed
3/8/2010	10:25:03 AM	SiCl4 post valve closed
3/8/2010	10:25:03 AM	Main Vac valve closed
3/8/2010	10:25:03 AM	Bypass valve closed
3/8/2010	10:25:03 AM	Bubbler valve closed
3/8/2010	10:25:03 AM	Helium MFC set to  0.000000
3/8/2010	10:25:03 AM	H2 MFC set to  0.000000
3/8/2010	10:25:03 AM	BCl3 MFC set to  0.000000
3/8/2010	10:25:03 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:25:03 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	10:25:03 AM	Tube furnace set to 0
3/8/2010	10:25:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:25:13 AM	Recipe started at 10:25 AM
3/8/2010	10:25:13 AM	H2 valve closed
3/8/2010	10:25:13 AM	BCl3 valve closed
3/8/2010	10:25:13 AM	PH3 valve closed
3/8/2010	10:25:13 AM	SiCl4 pre valve closed
3/8/2010	10:25:13 AM	SiCl4 post valve closed
3/8/2010	10:25:13 AM	Main Vac valve closed
3/8/2010	10:25:13 AM	Bypass valve closed
3/8/2010	10:25:13 AM	Bubbler valve closed
3/8/2010	10:25:13 AM	Helium valve opened
3/8/2010	10:25:13 AM	Helium MFC set to  500.000000
3/8/2010	10:25:13 AM	H2 MFC set to  0.000000
3/8/2010	10:25:13 AM	BCl3 MFC set to  0.000000
3/8/2010	10:25:13 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:25:13 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:25:13 AM	Tube furnace set to 0
3/8/2010	10:25:59 AM	Run aborted at 10:25 AM
3/8/2010	10:25:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:26:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:26:10 AM	Recipe started at 10:26 AM
3/8/2010	10:26:10 AM	H2 valve closed
3/8/2010	10:26:10 AM	BCl3 valve closed
3/8/2010	10:26:10 AM	PH3 valve closed
3/8/2010	10:26:10 AM	SiCl4 pre valve closed
3/8/2010	10:26:10 AM	SiCl4 post valve closed
3/8/2010	10:26:10 AM	Main Vac valve closed
3/8/2010	10:26:10 AM	Bypass valve closed
3/8/2010	10:26:10 AM	Bubbler valve closed
3/8/2010	10:26:10 AM	Helium valve opened
3/8/2010	10:26:10 AM	Helium MFC set to  500.000000
3/8/2010	10:26:10 AM	H2 MFC set to  0.000000
3/8/2010	10:26:10 AM	BCl3 MFC set to  0.000000
3/8/2010	10:26:10 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:26:10 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:26:10 AM	Tube furnace set to 0
3/8/2010	10:26:34 AM	Helium valve closed
3/8/2010	10:26:34 AM	H2 valve closed
3/8/2010	10:26:34 AM	BCl3 valve closed
3/8/2010	10:26:34 AM	PH3 valve closed
3/8/2010	10:26:34 AM	SiCl4 pre valve closed
3/8/2010	10:26:34 AM	SiCl4 post valve closed
3/8/2010	10:26:34 AM	Main Vac valve closed
3/8/2010	10:26:34 AM	Bypass valve closed
3/8/2010	10:26:34 AM	Bubbler valve closed
3/8/2010	10:26:34 AM	Helium MFC set to  0.000000
3/8/2010	10:26:34 AM	H2 MFC set to  0.000000
3/8/2010	10:26:34 AM	BCl3 MFC set to  0.000000
3/8/2010	10:26:34 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:26:34 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:26:34 AM	Tube furnace set to 0
3/8/2010	10:26:34 AM	Run finished at 10:26 AM
3/8/2010	10:26:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:27:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:27:07 AM	Recipe started at 10:27 AM
3/8/2010	10:27:07 AM	H2 valve closed
3/8/2010	10:27:07 AM	BCl3 valve closed
3/8/2010	10:27:07 AM	PH3 valve closed
3/8/2010	10:27:07 AM	SiCl4 pre valve closed
3/8/2010	10:27:07 AM	SiCl4 post valve closed
3/8/2010	10:27:07 AM	Main Vac valve closed
3/8/2010	10:27:07 AM	Bypass valve closed
3/8/2010	10:27:07 AM	Bubbler valve closed
3/8/2010	10:27:07 AM	Helium valve opened
3/8/2010	10:27:07 AM	Helium MFC set to  500.000000
3/8/2010	10:27:07 AM	H2 MFC set to  0.000000
3/8/2010	10:27:07 AM	BCl3 MFC set to  0.000000
3/8/2010	10:27:07 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:27:07 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:27:07 AM	Tube furnace set to 0
3/8/2010	10:27:07 AM	Helium valve closed
3/8/2010	10:27:07 AM	H2 valve closed
3/8/2010	10:27:07 AM	BCl3 valve closed
3/8/2010	10:27:07 AM	PH3 valve closed
3/8/2010	10:27:07 AM	SiCl4 pre valve closed
3/8/2010	10:27:07 AM	SiCl4 post valve closed
3/8/2010	10:27:07 AM	Main Vac valve closed
3/8/2010	10:27:07 AM	Bypass valve closed
3/8/2010	10:27:07 AM	Bubbler valve closed
3/8/2010	10:27:07 AM	Helium MFC set to  0.000000
3/8/2010	10:27:07 AM	H2 MFC set to  0.000000
3/8/2010	10:27:07 AM	BCl3 MFC set to  0.000000
3/8/2010	10:27:07 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:27:07 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:27:07 AM	Tube furnace set to 0
3/8/2010	10:27:07 AM	Run finished at 10:27 AM
3/8/2010	10:27:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:28:46 AM	Program exited cleanly
3/8/2010	10:29:25 AM	Program started normally
3/8/2010	10:29:25 AM	Helium valve closed
3/8/2010	10:29:25 AM	H2 valve closed
3/8/2010	10:29:25 AM	BCl3 valve closed
3/8/2010	10:29:25 AM	PH3 valve closed
3/8/2010	10:29:25 AM	SiCl4 pre valve closed
3/8/2010	10:29:25 AM	SiCl4 post valve closed
3/8/2010	10:29:25 AM	Main Vac valve closed
3/8/2010	10:29:25 AM	Bypass valve closed
3/8/2010	10:29:25 AM	Bubbler valve closed
3/8/2010	10:29:25 AM	Helium MFC set to  0.000000
3/8/2010	10:29:25 AM	H2 MFC set to  0.000000
3/8/2010	10:29:25 AM	BCl3 MFC set to  0.000000
3/8/2010	10:29:25 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:29:25 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	10:29:25 AM	Tube furnace set to 0
3/8/2010	10:29:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:29:30 AM	Recipe started at 10:29 AM
3/8/2010	10:29:30 AM	H2 valve closed
3/8/2010	10:29:30 AM	BCl3 valve closed
3/8/2010	10:29:30 AM	PH3 valve closed
3/8/2010	10:29:30 AM	SiCl4 pre valve closed
3/8/2010	10:29:30 AM	SiCl4 post valve closed
3/8/2010	10:29:30 AM	Main Vac valve closed
3/8/2010	10:29:30 AM	Bypass valve closed
3/8/2010	10:29:30 AM	Bubbler valve closed
3/8/2010	10:29:30 AM	Helium valve opened
3/8/2010	10:29:30 AM	Helium MFC set to  500.000000
3/8/2010	10:29:30 AM	H2 MFC set to  0.000000
3/8/2010	10:29:30 AM	BCl3 MFC set to  0.000000
3/8/2010	10:29:30 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:29:30 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:29:30 AM	Tube furnace set to 0
3/8/2010	10:29:32 AM	Helium valve closed
3/8/2010	10:29:32 AM	H2 valve closed
3/8/2010	10:29:32 AM	BCl3 valve closed
3/8/2010	10:29:32 AM	PH3 valve closed
3/8/2010	10:29:32 AM	SiCl4 pre valve closed
3/8/2010	10:29:32 AM	SiCl4 post valve closed
3/8/2010	10:29:32 AM	Main Vac valve closed
3/8/2010	10:29:32 AM	Bypass valve closed
3/8/2010	10:29:32 AM	Bubbler valve closed
3/8/2010	10:29:32 AM	Helium MFC set to  0.000000
3/8/2010	10:29:32 AM	H2 MFC set to  0.000000
3/8/2010	10:29:32 AM	BCl3 MFC set to  0.000000
3/8/2010	10:29:32 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:29:32 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:29:32 AM	Tube furnace set to 0
3/8/2010	10:29:33 AM	Run finished at 10:29 AM
3/8/2010	10:29:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:29:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:29:45 AM	Recipe started at 10:29 AM
3/8/2010	10:29:45 AM	H2 valve closed
3/8/2010	10:29:45 AM	BCl3 valve closed
3/8/2010	10:29:45 AM	PH3 valve closed
3/8/2010	10:29:45 AM	SiCl4 pre valve closed
3/8/2010	10:29:45 AM	SiCl4 post valve closed
3/8/2010	10:29:45 AM	Main Vac valve closed
3/8/2010	10:29:45 AM	Bypass valve closed
3/8/2010	10:29:45 AM	Bubbler valve closed
3/8/2010	10:29:45 AM	Helium valve opened
3/8/2010	10:29:45 AM	Helium MFC set to  500.000000
3/8/2010	10:29:45 AM	H2 MFC set to  0.000000
3/8/2010	10:29:45 AM	BCl3 MFC set to  0.000000
3/8/2010	10:29:45 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:29:45 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:29:45 AM	Tube furnace set to 0
3/8/2010	10:29:45 AM	Helium valve closed
3/8/2010	10:29:45 AM	H2 valve closed
3/8/2010	10:29:45 AM	BCl3 valve closed
3/8/2010	10:29:45 AM	PH3 valve closed
3/8/2010	10:29:45 AM	SiCl4 pre valve closed
3/8/2010	10:29:45 AM	SiCl4 post valve closed
3/8/2010	10:29:45 AM	Main Vac valve closed
3/8/2010	10:29:45 AM	Bypass valve closed
3/8/2010	10:29:45 AM	Bubbler valve closed
3/8/2010	10:29:45 AM	Helium MFC set to  0.000000
3/8/2010	10:29:45 AM	H2 MFC set to  0.000000
3/8/2010	10:29:45 AM	BCl3 MFC set to  0.000000
3/8/2010	10:29:45 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:29:45 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:29:45 AM	Tube furnace set to 0
3/8/2010	10:29:45 AM	Run finished at 10:29 AM
3/8/2010	10:29:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:30:11 AM	Program started after a nonstandard shutdown
3/8/2010	10:30:11 AM	Helium valve closed
3/8/2010	10:30:12 AM	H2 valve closed
3/8/2010	10:30:12 AM	BCl3 valve closed
3/8/2010	10:30:12 AM	PH3 valve closed
3/8/2010	10:30:12 AM	SiCl4 pre valve closed
3/8/2010	10:30:12 AM	SiCl4 post valve closed
3/8/2010	10:30:12 AM	Main Vac valve closed
3/8/2010	10:30:12 AM	Bypass valve closed
3/8/2010	10:30:12 AM	Bubbler valve closed
3/8/2010	10:30:12 AM	Helium MFC set to  0.000000
3/8/2010	10:30:12 AM	H2 MFC set to  0.000000
3/8/2010	10:30:12 AM	BCl3 MFC set to  0.000000
3/8/2010	10:30:12 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:30:12 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	10:30:12 AM	Tube furnace set to 0
3/8/2010	10:30:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:30:15 AM	Recipe started at 10:30 AM
3/8/2010	10:30:15 AM	H2 valve closed
3/8/2010	10:30:15 AM	BCl3 valve closed
3/8/2010	10:30:15 AM	PH3 valve closed
3/8/2010	10:30:15 AM	SiCl4 pre valve closed
3/8/2010	10:30:15 AM	SiCl4 post valve closed
3/8/2010	10:30:15 AM	Main Vac valve closed
3/8/2010	10:30:15 AM	Bypass valve closed
3/8/2010	10:30:15 AM	Bubbler valve closed
3/8/2010	10:30:15 AM	Helium valve opened
3/8/2010	10:30:15 AM	Helium MFC set to  500.000000
3/8/2010	10:30:15 AM	H2 MFC set to  0.000000
3/8/2010	10:30:15 AM	BCl3 MFC set to  0.000000
3/8/2010	10:30:15 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:30:15 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:30:15 AM	Tube furnace set to 0
3/8/2010	10:30:16 AM	Helium valve closed
3/8/2010	10:30:16 AM	H2 valve closed
3/8/2010	10:30:16 AM	BCl3 valve closed
3/8/2010	10:30:16 AM	PH3 valve closed
3/8/2010	10:30:16 AM	SiCl4 pre valve closed
3/8/2010	10:30:16 AM	SiCl4 post valve closed
3/8/2010	10:30:16 AM	Main Vac valve closed
3/8/2010	10:30:16 AM	Bypass valve closed
3/8/2010	10:30:16 AM	Bubbler valve closed
3/8/2010	10:30:16 AM	Helium MFC set to  0.000000
3/8/2010	10:30:16 AM	H2 MFC set to  0.000000
3/8/2010	10:30:16 AM	BCl3 MFC set to  0.000000
3/8/2010	10:30:16 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:30:16 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:30:16 AM	Tube furnace set to 0
3/8/2010	10:30:16 AM	Run finished at 10:30 AM
3/8/2010	10:30:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:30:28 AM	Helium valve opened
3/8/2010	10:30:30 AM	Helium valve closed
3/8/2010	10:30:40 AM	Helium valve opened
3/8/2010	10:30:48 AM	Helium MFC set to  100.000000
3/8/2010	10:31:16 AM	Helium MFC set to  250.000000
3/8/2010	10:31:34 AM	Helium valve closed
3/8/2010	10:31:34 AM	H2 valve closed
3/8/2010	10:31:34 AM	BCl3 valve closed
3/8/2010	10:31:34 AM	PH3 valve closed
3/8/2010	10:31:34 AM	SiCl4 pre valve closed
3/8/2010	10:31:34 AM	SiCl4 post valve closed
3/8/2010	10:31:34 AM	Main Vac valve closed
3/8/2010	10:31:34 AM	Bubbler valve closed
3/8/2010	10:31:34 AM	Bypass valve opened
3/8/2010	10:31:34 AM	Helium MFC set to  0.000000
3/8/2010	10:31:34 AM	H2 MFC set to  0.000000
3/8/2010	10:31:34 AM	BCl3 MFC set to  0.000000
3/8/2010	10:31:34 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:31:34 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	10:31:34 AM	Tube furnace set to 0
3/8/2010	10:31:34 AM	Baratron reads 901.588320 Torr.  Emergency exit.
3/8/2010	10:31:37 AM	Program exited cleanly
3/8/2010	10:31:42 AM	Program started normally
3/8/2010	10:31:42 AM	Helium valve closed
3/8/2010	10:31:42 AM	H2 valve closed
3/8/2010	10:31:42 AM	BCl3 valve closed
3/8/2010	10:31:42 AM	PH3 valve closed
3/8/2010	10:31:42 AM	SiCl4 pre valve closed
3/8/2010	10:31:42 AM	SiCl4 post valve closed
3/8/2010	10:31:42 AM	Main Vac valve closed
3/8/2010	10:31:42 AM	Bypass valve closed
3/8/2010	10:31:42 AM	Bubbler valve closed
3/8/2010	10:31:42 AM	Helium MFC set to  0.000000
3/8/2010	10:31:42 AM	H2 MFC set to  0.000000
3/8/2010	10:31:42 AM	BCl3 MFC set to  0.000000
3/8/2010	10:31:42 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:31:42 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	10:31:42 AM	Tube furnace set to 0
3/8/2010	10:32:29 AM	Program exited cleanly
3/8/2010	10:49:26 AM	Program started normally
3/8/2010	10:49:26 AM	Helium valve closed
3/8/2010	10:49:26 AM	H2 valve closed
3/8/2010	10:49:26 AM	BCl3 valve closed
3/8/2010	10:49:26 AM	PH3 valve closed
3/8/2010	10:49:26 AM	SiCl4 pre valve closed
3/8/2010	10:49:26 AM	SiCl4 post valve closed
3/8/2010	10:49:26 AM	Main Vac valve closed
3/8/2010	10:49:26 AM	Bypass valve closed
3/8/2010	10:49:26 AM	Bubbler valve closed
3/8/2010	10:49:26 AM	Helium MFC set to  0.000000
3/8/2010	10:49:26 AM	H2 MFC set to  0.000000
3/8/2010	10:49:26 AM	BCl3 MFC set to  0.000000
3/8/2010	10:49:27 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:49:27 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	10:49:27 AM	Tube furnace set to 0
3/8/2010	10:49:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:49:31 AM	Recipe started at 10:49 AM
3/8/2010	10:49:31 AM	H2 valve closed
3/8/2010	10:49:31 AM	BCl3 valve closed
3/8/2010	10:49:31 AM	PH3 valve closed
3/8/2010	10:49:31 AM	SiCl4 pre valve closed
3/8/2010	10:49:31 AM	SiCl4 post valve closed
3/8/2010	10:49:31 AM	Main Vac valve closed
3/8/2010	10:49:31 AM	Bypass valve closed
3/8/2010	10:49:31 AM	Bubbler valve closed
3/8/2010	10:49:31 AM	Helium valve opened
3/8/2010	10:49:31 AM	Helium MFC set to  500.000000
3/8/2010	10:49:31 AM	H2 MFC set to  0.000000
3/8/2010	10:49:31 AM	BCl3 MFC set to  0.000000
3/8/2010	10:49:31 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:49:31 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:49:31 AM	Tube furnace set to 0
3/8/2010	10:50:29 AM	Helium valve closed
3/8/2010	10:50:29 AM	H2 valve closed
3/8/2010	10:50:29 AM	BCl3 valve closed
3/8/2010	10:50:29 AM	PH3 valve closed
3/8/2010	10:50:29 AM	SiCl4 pre valve closed
3/8/2010	10:50:30 AM	SiCl4 post valve closed
3/8/2010	10:50:30 AM	Main Vac valve closed
3/8/2010	10:50:30 AM	Bypass valve closed
3/8/2010	10:50:30 AM	Bubbler valve closed
3/8/2010	10:50:30 AM	Helium MFC set to  0.000000
3/8/2010	10:50:30 AM	H2 MFC set to  0.000000
3/8/2010	10:50:30 AM	BCl3 MFC set to  0.000000
3/8/2010	10:50:30 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:50:30 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:50:30 AM	Tube furnace set to 0
3/8/2010	10:50:30 AM	Run finished at 10:50 AM
3/8/2010	10:50:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:50:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	10:50:38 AM	Recipe started at 10:50 AM
3/8/2010	10:50:38 AM	Helium valve closed
3/8/2010	10:50:38 AM	H2 valve closed
3/8/2010	10:50:38 AM	BCl3 valve closed
3/8/2010	10:50:38 AM	PH3 valve closed
3/8/2010	10:50:38 AM	SiCl4 pre valve closed
3/8/2010	10:50:38 AM	SiCl4 post valve closed
3/8/2010	10:50:38 AM	Main Vac valve closed
3/8/2010	10:50:38 AM	Bubbler valve closed
3/8/2010	10:50:38 AM	Bypass valve opened
3/8/2010	10:50:38 AM	Helium MFC set to  0.000000
3/8/2010	10:50:38 AM	H2 MFC set to  0.000000
3/8/2010	10:50:38 AM	BCl3 MFC set to  0.000000
3/8/2010	10:50:38 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:50:38 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:50:38 AM	Tube furnace set to 0
3/8/2010	10:51:00 AM	Helium valve closed
3/8/2010	10:51:00 AM	H2 valve closed
3/8/2010	10:51:00 AM	BCl3 valve closed
3/8/2010	10:51:00 AM	PH3 valve closed
3/8/2010	10:51:00 AM	SiCl4 pre valve closed
3/8/2010	10:51:00 AM	SiCl4 post valve closed
3/8/2010	10:51:00 AM	Bubbler valve closed
3/8/2010	10:51:00 AM	Main Vac valve opened
3/8/2010	10:51:00 AM	Bypass valve opened
3/8/2010	10:51:00 AM	Helium MFC set to  0.000000
3/8/2010	10:51:00 AM	H2 MFC set to  0.000000
3/8/2010	10:51:00 AM	BCl3 MFC set to  0.000000
3/8/2010	10:51:00 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:51:00 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:51:00 AM	Tube furnace set to 0
3/8/2010	10:51:00 AM	Run finished at 10:51 AM
3/8/2010	10:51:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	10:51:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	10:51:07 AM	Recipe started at 10:51 AM
3/8/2010	10:51:07 AM	Helium valve closed
3/8/2010	10:51:07 AM	H2 valve closed
3/8/2010	10:51:07 AM	BCl3 valve closed
3/8/2010	10:51:07 AM	PH3 valve closed
3/8/2010	10:51:07 AM	SiCl4 pre valve closed
3/8/2010	10:51:07 AM	SiCl4 post valve closed
3/8/2010	10:51:07 AM	Main Vac valve closed
3/8/2010	10:51:07 AM	Bubbler valve closed
3/8/2010	10:51:07 AM	Bypass valve opened
3/8/2010	10:51:07 AM	Helium MFC set to  0.000000
3/8/2010	10:51:07 AM	H2 MFC set to  0.000000
3/8/2010	10:51:07 AM	BCl3 MFC set to  0.000000
3/8/2010	10:51:07 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:51:07 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:51:07 AM	Tube furnace set to 0
3/8/2010	10:51:07 AM	Helium valve closed
3/8/2010	10:51:07 AM	H2 valve closed
3/8/2010	10:51:07 AM	BCl3 valve closed
3/8/2010	10:51:07 AM	PH3 valve closed
3/8/2010	10:51:07 AM	SiCl4 pre valve closed
3/8/2010	10:51:07 AM	SiCl4 post valve closed
3/8/2010	10:51:07 AM	Bubbler valve closed
3/8/2010	10:51:07 AM	Main Vac valve opened
3/8/2010	10:51:07 AM	Bypass valve opened
3/8/2010	10:51:07 AM	Helium MFC set to  0.000000
3/8/2010	10:51:07 AM	H2 MFC set to  0.000000
3/8/2010	10:51:07 AM	BCl3 MFC set to  0.000000
3/8/2010	10:51:07 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:51:07 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:51:07 AM	Tube furnace set to 0
3/8/2010	10:51:07 AM	Run finished at 10:51 AM
3/8/2010	10:51:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	10:51:11 AM	Main Vac valve closed
3/8/2010	10:51:13 AM	Main Vac valve opened
3/8/2010	10:51:38 AM	Main Vac valve closed
3/8/2010	10:51:41 AM	Bypass valve closed
3/8/2010	10:51:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:51:44 AM	Recipe started at 10:51 AM
3/8/2010	10:51:44 AM	H2 valve closed
3/8/2010	10:51:44 AM	BCl3 valve closed
3/8/2010	10:51:44 AM	PH3 valve closed
3/8/2010	10:51:44 AM	SiCl4 pre valve closed
3/8/2010	10:51:44 AM	SiCl4 post valve closed
3/8/2010	10:51:44 AM	Main Vac valve closed
3/8/2010	10:51:44 AM	Bypass valve closed
3/8/2010	10:51:44 AM	Bubbler valve closed
3/8/2010	10:51:44 AM	Helium valve opened
3/8/2010	10:51:44 AM	Helium MFC set to  500.000000
3/8/2010	10:51:44 AM	H2 MFC set to  0.000000
3/8/2010	10:51:44 AM	BCl3 MFC set to  0.000000
3/8/2010	10:51:44 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:51:44 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:51:44 AM	Tube furnace set to 0
3/8/2010	10:53:06 AM	Helium valve closed
3/8/2010	10:53:06 AM	H2 valve closed
3/8/2010	10:53:06 AM	BCl3 valve closed
3/8/2010	10:53:06 AM	PH3 valve closed
3/8/2010	10:53:06 AM	SiCl4 pre valve closed
3/8/2010	10:53:06 AM	SiCl4 post valve closed
3/8/2010	10:53:06 AM	Main Vac valve closed
3/8/2010	10:53:06 AM	Bypass valve closed
3/8/2010	10:53:06 AM	Bubbler valve closed
3/8/2010	10:53:06 AM	Helium MFC set to  0.000000
3/8/2010	10:53:06 AM	H2 MFC set to  0.000000
3/8/2010	10:53:06 AM	BCl3 MFC set to  0.000000
3/8/2010	10:53:06 AM	SiCl4 MFC set to  0.000000
3/8/2010	10:53:06 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:53:06 AM	Tube furnace set to 0
3/8/2010	10:53:06 AM	Run finished at 10:53 AM
3/8/2010	10:53:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:53:24 AM	Bubbler valve opened
3/8/2010	10:53:41 AM	Bubbler valve closed
3/8/2010	10:53:44 AM	Program exited cleanly
3/8/2010	11:00:38 AM	Program started normally
3/8/2010	11:00:38 AM	Helium valve closed
3/8/2010	11:00:38 AM	H2 valve closed
3/8/2010	11:00:38 AM	BCl3 valve closed
3/8/2010	11:00:38 AM	PH3 valve closed
3/8/2010	11:00:38 AM	SiCl4 pre valve closed
3/8/2010	11:00:38 AM	SiCl4 post valve closed
3/8/2010	11:00:38 AM	Main Vac valve closed
3/8/2010	11:00:38 AM	Bypass valve closed
3/8/2010	11:00:38 AM	Bubbler valve closed
3/8/2010	11:00:38 AM	Helium MFC set to  0.000000
3/8/2010	11:00:38 AM	H2 MFC set to  0.000000
3/8/2010	11:00:38 AM	BCl3 MFC set to  0.000000
3/8/2010	11:00:38 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:00:38 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:00:38 AM	Tube furnace set to 0
3/8/2010	11:00:41 AM	Bubbler valve opened
3/8/2010	11:00:56 AM	Bubbler valve closed
3/8/2010	11:01:26 AM	Program exited cleanly
3/8/2010	11:01:41 AM	Program started normally
3/8/2010	11:01:41 AM	Helium valve closed
3/8/2010	11:01:41 AM	H2 valve closed
3/8/2010	11:01:41 AM	BCl3 valve closed
3/8/2010	11:01:41 AM	PH3 valve closed
3/8/2010	11:01:41 AM	SiCl4 pre valve closed
3/8/2010	11:01:41 AM	SiCl4 post valve closed
3/8/2010	11:01:41 AM	Main Vac valve closed
3/8/2010	11:01:41 AM	Bypass valve closed
3/8/2010	11:01:41 AM	Bubbler valve closed
3/8/2010	11:01:41 AM	Helium MFC set to  0.000000
3/8/2010	11:01:41 AM	H2 MFC set to  0.000000
3/8/2010	11:01:41 AM	BCl3 MFC set to  0.000000
3/8/2010	11:01:41 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:01:41 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:01:41 AM	Tube furnace set to 0
3/8/2010	11:01:57 AM	Bypass valve opened
3/8/2010	11:02:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:02:24 AM	Recipe started at 11:02 AM
3/8/2010	11:02:24 AM	Helium valve closed
3/8/2010	11:02:24 AM	H2 valve closed
3/8/2010	11:02:24 AM	BCl3 valve closed
3/8/2010	11:02:24 AM	PH3 valve closed
3/8/2010	11:02:24 AM	SiCl4 pre valve closed
3/8/2010	11:02:24 AM	SiCl4 post valve closed
3/8/2010	11:02:24 AM	Main Vac valve closed
3/8/2010	11:02:24 AM	Bubbler valve closed
3/8/2010	11:02:24 AM	Bypass valve opened
3/8/2010	11:02:24 AM	Helium MFC set to  0.000000
3/8/2010	11:02:24 AM	H2 MFC set to  0.000000
3/8/2010	11:02:24 AM	BCl3 MFC set to  0.000000
3/8/2010	11:02:24 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:02:24 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:02:24 AM	Tube furnace set to 0
3/8/2010	11:02:24 AM	Helium valve closed
3/8/2010	11:02:24 AM	H2 valve closed
3/8/2010	11:02:24 AM	BCl3 valve closed
3/8/2010	11:02:24 AM	PH3 valve closed
3/8/2010	11:02:24 AM	SiCl4 pre valve closed
3/8/2010	11:02:24 AM	SiCl4 post valve closed
3/8/2010	11:02:24 AM	Bubbler valve closed
3/8/2010	11:02:24 AM	Main Vac valve opened
3/8/2010	11:02:24 AM	Bypass valve opened
3/8/2010	11:02:24 AM	Helium MFC set to  0.000000
3/8/2010	11:02:24 AM	H2 MFC set to  0.000000
3/8/2010	11:02:24 AM	BCl3 MFC set to  0.000000
3/8/2010	11:02:24 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:02:24 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:02:24 AM	Tube furnace set to 0
3/8/2010	11:02:24 AM	Run finished at 11:02 AM
3/8/2010	11:02:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:02:38 AM	Program exited cleanly
3/8/2010	11:06:25 AM	Program started normally
3/8/2010	11:06:25 AM	Helium valve closed
3/8/2010	11:06:25 AM	H2 valve closed
3/8/2010	11:06:25 AM	BCl3 valve closed
3/8/2010	11:06:25 AM	PH3 valve closed
3/8/2010	11:06:25 AM	SiCl4 pre valve closed
3/8/2010	11:06:25 AM	SiCl4 post valve closed
3/8/2010	11:06:25 AM	Main Vac valve closed
3/8/2010	11:06:25 AM	Bypass valve closed
3/8/2010	11:06:25 AM	Bubbler valve closed
3/8/2010	11:06:25 AM	Helium MFC set to  0.000000
3/8/2010	11:06:25 AM	H2 MFC set to  0.000000
3/8/2010	11:06:25 AM	BCl3 MFC set to  0.000000
3/8/2010	11:06:25 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:06:25 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:06:25 AM	Tube furnace set to 0
3/8/2010	11:07:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:07:00 AM	Recipe started at 11:07 AM
3/8/2010	11:07:00 AM	H2 valve closed
3/8/2010	11:07:00 AM	BCl3 valve closed
3/8/2010	11:07:00 AM	PH3 valve closed
3/8/2010	11:07:00 AM	SiCl4 pre valve closed
3/8/2010	11:07:00 AM	SiCl4 post valve closed
3/8/2010	11:07:00 AM	Main Vac valve closed
3/8/2010	11:07:00 AM	Bypass valve closed
3/8/2010	11:07:00 AM	Bubbler valve closed
3/8/2010	11:07:00 AM	Helium valve opened
3/8/2010	11:07:00 AM	Helium MFC set to  500.000000
3/8/2010	11:07:00 AM	H2 MFC set to  0.000000
3/8/2010	11:07:00 AM	BCl3 MFC set to  0.000000
3/8/2010	11:07:00 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:07:00 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:07:00 AM	Tube furnace set to 0
3/8/2010	11:08:00 AM	Helium valve closed
3/8/2010	11:08:00 AM	H2 valve closed
3/8/2010	11:08:00 AM	BCl3 valve closed
3/8/2010	11:08:00 AM	PH3 valve closed
3/8/2010	11:08:00 AM	SiCl4 pre valve closed
3/8/2010	11:08:00 AM	SiCl4 post valve closed
3/8/2010	11:08:00 AM	Main Vac valve closed
3/8/2010	11:08:00 AM	Bypass valve closed
3/8/2010	11:08:00 AM	Bubbler valve closed
3/8/2010	11:08:00 AM	Helium MFC set to  0.000000
3/8/2010	11:08:00 AM	H2 MFC set to  0.000000
3/8/2010	11:08:00 AM	BCl3 MFC set to  0.000000
3/8/2010	11:08:00 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:08:00 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:08:00 AM	Tube furnace set to 0
3/8/2010	11:08:00 AM	Run finished at 11:08 AM
3/8/2010	11:08:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:08:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:08:09 AM	Recipe started at 11:08 AM
3/8/2010	11:08:09 AM	H2 valve closed
3/8/2010	11:08:09 AM	BCl3 valve closed
3/8/2010	11:08:09 AM	PH3 valve closed
3/8/2010	11:08:09 AM	SiCl4 pre valve closed
3/8/2010	11:08:09 AM	SiCl4 post valve closed
3/8/2010	11:08:09 AM	Main Vac valve closed
3/8/2010	11:08:09 AM	Bypass valve closed
3/8/2010	11:08:09 AM	Bubbler valve closed
3/8/2010	11:08:09 AM	Helium valve opened
3/8/2010	11:08:09 AM	Helium MFC set to  500.000000
3/8/2010	11:08:09 AM	H2 MFC set to  0.000000
3/8/2010	11:08:09 AM	BCl3 MFC set to  0.000000
3/8/2010	11:08:09 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:08:09 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:08:09 AM	Tube furnace set to 0
3/8/2010	11:08:24 AM	Run aborted at 11:08 AM
3/8/2010	11:08:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:08:35 AM	Helium valve closed
3/8/2010	11:08:43 AM	Bypass valve opened
3/8/2010	11:08:58 AM	Bypass valve closed
3/8/2010	11:09:13 AM	Main Vac valve opened
3/8/2010	11:09:39 AM	Bypass valve opened
3/8/2010	11:09:44 AM	Bypass valve closed
3/8/2010	11:09:44 AM	Main Vac valve closed
3/8/2010	11:09:48 AM	Main Vac valve opened
3/8/2010	11:09:49 AM	Main Vac valve closed
3/8/2010	11:10:12 AM	SiCl4 post valve opened
3/8/2010	11:10:13 AM	SiCl4 post valve closed
3/8/2010	11:10:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:10:22 AM	Recipe started at 11:10 AM
3/8/2010	11:10:22 AM	Helium valve closed
3/8/2010	11:10:22 AM	H2 valve closed
3/8/2010	11:10:22 AM	BCl3 valve closed
3/8/2010	11:10:22 AM	PH3 valve closed
3/8/2010	11:10:22 AM	SiCl4 pre valve closed
3/8/2010	11:10:22 AM	SiCl4 post valve closed
3/8/2010	11:10:22 AM	Main Vac valve closed
3/8/2010	11:10:22 AM	Bubbler valve closed
3/8/2010	11:10:22 AM	Bypass valve opened
3/8/2010	11:10:22 AM	Helium MFC set to  0.000000
3/8/2010	11:10:22 AM	H2 MFC set to  0.000000
3/8/2010	11:10:22 AM	BCl3 MFC set to  0.000000
3/8/2010	11:10:22 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:10:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:10:22 AM	Tube furnace set to 0
3/8/2010	11:10:36 AM	Helium valve closed
3/8/2010	11:10:36 AM	H2 valve closed
3/8/2010	11:10:36 AM	BCl3 valve closed
3/8/2010	11:10:36 AM	PH3 valve closed
3/8/2010	11:10:36 AM	SiCl4 pre valve closed
3/8/2010	11:10:36 AM	SiCl4 post valve closed
3/8/2010	11:10:36 AM	Bubbler valve closed
3/8/2010	11:10:36 AM	Main Vac valve opened
3/8/2010	11:10:36 AM	Bypass valve opened
3/8/2010	11:10:36 AM	Helium MFC set to  0.000000
3/8/2010	11:10:36 AM	H2 MFC set to  0.000000
3/8/2010	11:10:36 AM	BCl3 MFC set to  0.000000
3/8/2010	11:10:36 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:10:36 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:10:36 AM	Tube furnace set to 0
3/8/2010	11:10:36 AM	Run finished at 11:10 AM
3/8/2010	11:10:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:11:30 AM	Recipe started at 11:11 AM
3/8/2010	11:11:30 AM	H2 valve closed
3/8/2010	11:11:30 AM	BCl3 valve closed
3/8/2010	11:11:30 AM	PH3 valve closed
3/8/2010	11:11:30 AM	SiCl4 pre valve closed
3/8/2010	11:11:30 AM	SiCl4 post valve closed
3/8/2010	11:11:30 AM	Main Vac valve closed
3/8/2010	11:11:30 AM	Bypass valve closed
3/8/2010	11:11:30 AM	Bubbler valve closed
3/8/2010	11:11:30 AM	Helium valve opened
3/8/2010	11:11:30 AM	Helium MFC set to  500.000000
3/8/2010	11:11:30 AM	H2 MFC set to  0.000000
3/8/2010	11:11:30 AM	BCl3 MFC set to  0.000000
3/8/2010	11:11:30 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:11:30 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:11:30 AM	Tube furnace set to 0
3/8/2010	11:13:08 AM	Helium valve closed
3/8/2010	11:13:08 AM	H2 valve closed
3/8/2010	11:13:08 AM	BCl3 valve closed
3/8/2010	11:13:08 AM	PH3 valve closed
3/8/2010	11:13:08 AM	SiCl4 pre valve closed
3/8/2010	11:13:08 AM	SiCl4 post valve closed
3/8/2010	11:13:08 AM	Main Vac valve closed
3/8/2010	11:13:08 AM	Bubbler valve closed
3/8/2010	11:13:08 AM	Bypass valve opened
3/8/2010	11:13:08 AM	Helium MFC set to  0.000000
3/8/2010	11:13:08 AM	H2 MFC set to  0.000000
3/8/2010	11:13:08 AM	BCl3 MFC set to  0.000000
3/8/2010	11:13:08 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:13:08 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:13:08 AM	Tube furnace set to 0
3/8/2010	11:13:08 AM	Baratron reads 901.588320 Torr.  Emergency exit.
3/8/2010	11:13:48 AM	Run aborted at 11:13 AM
3/8/2010	11:13:59 AM	Program exited cleanly
3/8/2010	11:16:42 AM	Program started normally
3/8/2010	11:16:42 AM	Helium valve closed
3/8/2010	11:16:42 AM	H2 valve closed
3/8/2010	11:16:42 AM	BCl3 valve closed
3/8/2010	11:16:42 AM	PH3 valve closed
3/8/2010	11:16:42 AM	SiCl4 pre valve closed
3/8/2010	11:16:42 AM	SiCl4 post valve closed
3/8/2010	11:16:42 AM	Main Vac valve closed
3/8/2010	11:16:42 AM	Bypass valve closed
3/8/2010	11:16:42 AM	Bubbler valve closed
3/8/2010	11:16:42 AM	Helium MFC set to  0.000000
3/8/2010	11:16:42 AM	H2 MFC set to  0.000000
3/8/2010	11:16:42 AM	BCl3 MFC set to  0.000000
3/8/2010	11:16:42 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:16:42 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:16:42 AM	Tube furnace set to 0
3/8/2010	11:16:45 AM	Bypass valve opened
3/8/2010	11:16:52 AM	Recipe started at 11:16 AM
3/8/2010	11:16:52 AM	Helium valve closed
3/8/2010	11:16:52 AM	H2 valve closed
3/8/2010	11:16:52 AM	BCl3 valve closed
3/8/2010	11:16:52 AM	PH3 valve closed
3/8/2010	11:16:52 AM	SiCl4 pre valve closed
3/8/2010	11:16:52 AM	SiCl4 post valve closed
3/8/2010	11:16:52 AM	Main Vac valve closed
3/8/2010	11:16:52 AM	Bubbler valve closed
3/8/2010	11:16:52 AM	Bypass valve opened
3/8/2010	11:16:52 AM	Helium MFC set to  0.000000
3/8/2010	11:16:52 AM	H2 MFC set to  0.000000
3/8/2010	11:16:52 AM	BCl3 MFC set to  0.000000
3/8/2010	11:16:52 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:16:52 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:16:52 AM	Tube furnace set to 0
3/8/2010	11:16:52 AM	Run finished at 11:16 AM
3/8/2010	11:17:12 AM	Recipe started at 11:17 AM
3/8/2010	11:17:12 AM	H2 valve closed
3/8/2010	11:17:12 AM	BCl3 valve closed
3/8/2010	11:17:12 AM	PH3 valve closed
3/8/2010	11:17:12 AM	SiCl4 pre valve closed
3/8/2010	11:17:12 AM	SiCl4 post valve closed
3/8/2010	11:17:12 AM	Main Vac valve closed
3/8/2010	11:17:13 AM	Bypass valve closed
3/8/2010	11:17:13 AM	Bubbler valve closed
3/8/2010	11:17:13 AM	Helium valve opened
3/8/2010	11:17:13 AM	Helium MFC set to  500.000000
3/8/2010	11:17:13 AM	H2 MFC set to  0.000000
3/8/2010	11:17:13 AM	BCl3 MFC set to  0.000000
3/8/2010	11:17:13 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:17:13 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:17:13 AM	Tube furnace set to 0
3/8/2010	11:17:23 AM	Helium valve closed
3/8/2010	11:17:23 AM	H2 valve closed
3/8/2010	11:17:23 AM	BCl3 valve closed
3/8/2010	11:17:23 AM	PH3 valve closed
3/8/2010	11:17:23 AM	SiCl4 pre valve closed
3/8/2010	11:17:23 AM	SiCl4 post valve closed
3/8/2010	11:17:23 AM	Main Vac valve closed
3/8/2010	11:17:23 AM	Bypass valve closed
3/8/2010	11:17:23 AM	Bubbler valve closed
3/8/2010	11:17:23 AM	Helium MFC set to  0.000000
3/8/2010	11:17:23 AM	H2 MFC set to  0.000000
3/8/2010	11:17:23 AM	BCl3 MFC set to  0.000000
3/8/2010	11:17:23 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:17:23 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:17:23 AM	Tube furnace set to 0
3/8/2010	11:17:38 AM	Helium valve closed
3/8/2010	11:17:38 AM	H2 valve closed
3/8/2010	11:17:38 AM	BCl3 valve closed
3/8/2010	11:17:38 AM	PH3 valve closed
3/8/2010	11:17:38 AM	SiCl4 pre valve closed
3/8/2010	11:17:38 AM	SiCl4 post valve closed
3/8/2010	11:17:38 AM	Main Vac valve closed
3/8/2010	11:17:38 AM	Bubbler valve closed
3/8/2010	11:17:38 AM	Bypass valve opened
3/8/2010	11:17:38 AM	Helium MFC set to  0.000000
3/8/2010	11:17:38 AM	H2 MFC set to  0.000000
3/8/2010	11:17:38 AM	BCl3 MFC set to  0.000000
3/8/2010	11:17:38 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:17:38 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:17:38 AM	Tube furnace set to 0
3/8/2010	11:17:47 AM	Helium valve closed
3/8/2010	11:17:47 AM	H2 valve closed
3/8/2010	11:17:47 AM	BCl3 valve closed
3/8/2010	11:17:47 AM	PH3 valve closed
3/8/2010	11:17:47 AM	SiCl4 pre valve closed
3/8/2010	11:17:47 AM	SiCl4 post valve closed
3/8/2010	11:17:47 AM	Bubbler valve closed
3/8/2010	11:17:47 AM	Main Vac valve opened
3/8/2010	11:17:47 AM	Bypass valve opened
3/8/2010	11:17:47 AM	Helium MFC set to  0.000000
3/8/2010	11:17:47 AM	H2 MFC set to  0.000000
3/8/2010	11:17:47 AM	BCl3 MFC set to  0.000000
3/8/2010	11:17:47 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:17:47 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:17:47 AM	Tube furnace set to 0
3/8/2010	11:18:31 AM	H2 valve closed
3/8/2010	11:18:31 AM	BCl3 valve closed
3/8/2010	11:18:31 AM	PH3 valve closed
3/8/2010	11:18:31 AM	SiCl4 pre valve closed
3/8/2010	11:18:31 AM	SiCl4 post valve closed
3/8/2010	11:18:31 AM	Main Vac valve closed
3/8/2010	11:18:31 AM	Bypass valve closed
3/8/2010	11:18:31 AM	Bubbler valve closed
3/8/2010	11:18:31 AM	Helium valve opened
3/8/2010	11:18:31 AM	Helium MFC set to  500.000000
3/8/2010	11:18:31 AM	H2 MFC set to  0.000000
3/8/2010	11:18:31 AM	BCl3 MFC set to  0.000000
3/8/2010	11:18:31 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:18:31 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:18:31 AM	Tube furnace set to 0
3/8/2010	11:19:27 AM	Run aborted at 11:19 AM
3/8/2010	11:19:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:19:34 AM	Recipe started at 11:19 AM
3/8/2010	11:19:34 AM	H2 valve closed
3/8/2010	11:19:34 AM	BCl3 valve closed
3/8/2010	11:19:34 AM	PH3 valve closed
3/8/2010	11:19:34 AM	SiCl4 pre valve closed
3/8/2010	11:19:34 AM	SiCl4 post valve closed
3/8/2010	11:19:34 AM	Main Vac valve closed
3/8/2010	11:19:34 AM	Bypass valve closed
3/8/2010	11:19:34 AM	Bubbler valve closed
3/8/2010	11:19:34 AM	Helium valve opened
3/8/2010	11:19:34 AM	Helium MFC set to  500.000000
3/8/2010	11:19:34 AM	H2 MFC set to  0.000000
3/8/2010	11:19:34 AM	BCl3 MFC set to  0.000000
3/8/2010	11:19:34 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:19:34 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:19:34 AM	Tube furnace set to 0
3/8/2010	11:19:54 AM	Helium valve closed
3/8/2010	11:19:54 AM	H2 valve closed
3/8/2010	11:19:54 AM	BCl3 valve closed
3/8/2010	11:19:54 AM	PH3 valve closed
3/8/2010	11:19:54 AM	SiCl4 pre valve closed
3/8/2010	11:19:54 AM	SiCl4 post valve closed
3/8/2010	11:19:54 AM	Main Vac valve closed
3/8/2010	11:19:54 AM	Bypass valve closed
3/8/2010	11:19:54 AM	Bubbler valve closed
3/8/2010	11:19:54 AM	Helium MFC set to  0.000000
3/8/2010	11:19:54 AM	H2 MFC set to  0.000000
3/8/2010	11:19:54 AM	BCl3 MFC set to  0.000000
3/8/2010	11:19:54 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:19:54 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:19:54 AM	Tube furnace set to 0
3/8/2010	11:19:54 AM	Run finished at 11:19 AM
3/8/2010	11:19:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:20:06 AM	Program exited cleanly
3/8/2010	11:27:48 AM	Program started normally
3/8/2010	11:27:48 AM	Helium valve closed
3/8/2010	11:27:48 AM	H2 valve closed
3/8/2010	11:27:48 AM	BCl3 valve closed
3/8/2010	11:27:48 AM	PH3 valve closed
3/8/2010	11:27:48 AM	SiCl4 pre valve closed
3/8/2010	11:27:48 AM	SiCl4 post valve closed
3/8/2010	11:27:48 AM	Main Vac valve closed
3/8/2010	11:27:48 AM	Bypass valve closed
3/8/2010	11:27:48 AM	Bubbler valve closed
3/8/2010	11:27:48 AM	Helium MFC set to  0.000000
3/8/2010	11:27:48 AM	H2 MFC set to  0.000000
3/8/2010	11:27:48 AM	BCl3 MFC set to  0.000000
3/8/2010	11:27:48 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:27:48 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:27:48 AM	Tube furnace set to 0
3/8/2010	11:27:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:27:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:27:57 AM	Recipe started at 11:27 AM
3/8/2010	11:27:57 AM	Helium valve closed
3/8/2010	11:27:57 AM	H2 valve closed
3/8/2010	11:27:57 AM	BCl3 valve closed
3/8/2010	11:27:57 AM	PH3 valve closed
3/8/2010	11:27:57 AM	SiCl4 pre valve closed
3/8/2010	11:27:57 AM	SiCl4 post valve closed
3/8/2010	11:27:57 AM	Main Vac valve closed
3/8/2010	11:27:57 AM	Bubbler valve closed
3/8/2010	11:27:57 AM	Bypass valve opened
3/8/2010	11:27:57 AM	Helium MFC set to  0.000000
3/8/2010	11:27:57 AM	H2 MFC set to  0.000000
3/8/2010	11:27:57 AM	BCl3 MFC set to  0.000000
3/8/2010	11:27:57 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:27:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:27:57 AM	Tube furnace set to 0
3/8/2010	11:28:19 AM	Helium valve closed
3/8/2010	11:28:19 AM	H2 valve closed
3/8/2010	11:28:19 AM	BCl3 valve closed
3/8/2010	11:28:19 AM	PH3 valve closed
3/8/2010	11:28:19 AM	SiCl4 pre valve closed
3/8/2010	11:28:19 AM	SiCl4 post valve closed
3/8/2010	11:28:19 AM	Bubbler valve closed
3/8/2010	11:28:19 AM	Main Vac valve opened
3/8/2010	11:28:19 AM	Bypass valve opened
3/8/2010	11:28:19 AM	Helium MFC set to  0.000000
3/8/2010	11:28:19 AM	H2 MFC set to  0.000000
3/8/2010	11:28:19 AM	BCl3 MFC set to  0.000000
3/8/2010	11:28:19 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:28:19 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:28:19 AM	Tube furnace set to 0
3/8/2010	11:28:20 AM	Run finished at 11:28 AM
3/8/2010	11:28:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:28:26 AM	Program exited cleanly
3/8/2010	11:28:44 AM	Program started normally
3/8/2010	11:28:44 AM	Helium valve closed
3/8/2010	11:28:44 AM	H2 valve closed
3/8/2010	11:28:44 AM	BCl3 valve closed
3/8/2010	11:28:44 AM	PH3 valve closed
3/8/2010	11:28:44 AM	SiCl4 pre valve closed
3/8/2010	11:28:44 AM	SiCl4 post valve closed
3/8/2010	11:28:44 AM	Main Vac valve closed
3/8/2010	11:28:44 AM	Bypass valve closed
3/8/2010	11:28:44 AM	Bubbler valve closed
3/8/2010	11:28:44 AM	Helium MFC set to  0.000000
3/8/2010	11:28:44 AM	H2 MFC set to  0.000000
3/8/2010	11:28:44 AM	BCl3 MFC set to  0.000000
3/8/2010	11:28:44 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:28:44 AM	Bypass solenoid MFC set to  760.000000
3/8/2010	11:28:44 AM	Tube furnace set to 0
3/8/2010	11:28:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:28:47 AM	Recipe started at 11:28 AM
3/8/2010	11:28:47 AM	Helium valve closed
3/8/2010	11:28:47 AM	H2 valve closed
3/8/2010	11:28:47 AM	BCl3 valve closed
3/8/2010	11:28:47 AM	PH3 valve closed
3/8/2010	11:28:47 AM	SiCl4 pre valve closed
3/8/2010	11:28:47 AM	SiCl4 post valve closed
3/8/2010	11:28:47 AM	Main Vac valve closed
3/8/2010	11:28:47 AM	Bubbler valve closed
3/8/2010	11:28:47 AM	Bypass valve opened
3/8/2010	11:28:47 AM	Helium MFC set to  0.000000
3/8/2010	11:28:47 AM	H2 MFC set to  0.000000
3/8/2010	11:28:47 AM	BCl3 MFC set to  0.000000
3/8/2010	11:28:47 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:28:47 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:28:47 AM	Tube furnace set to 0
3/8/2010	11:28:48 AM	Helium valve closed
3/8/2010	11:28:48 AM	H2 valve closed
3/8/2010	11:28:48 AM	BCl3 valve closed
3/8/2010	11:28:48 AM	PH3 valve closed
3/8/2010	11:28:48 AM	SiCl4 pre valve closed
3/8/2010	11:28:48 AM	SiCl4 post valve closed
3/8/2010	11:28:48 AM	Bubbler valve closed
3/8/2010	11:28:48 AM	Main Vac valve opened
3/8/2010	11:28:48 AM	Bypass valve opened
3/8/2010	11:28:48 AM	Helium MFC set to  0.000000
3/8/2010	11:28:48 AM	H2 MFC set to  0.000000
3/8/2010	11:28:48 AM	BCl3 MFC set to  0.000000
3/8/2010	11:28:48 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:28:48 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:28:48 AM	Tube furnace set to 0
3/8/2010	11:28:48 AM	Run finished at 11:28 AM
3/8/2010	11:28:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:28:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:28:56 AM	Recipe started at 11:28 AM
3/8/2010	11:28:56 AM	H2 valve closed
3/8/2010	11:28:56 AM	BCl3 valve closed
3/8/2010	11:28:56 AM	PH3 valve closed
3/8/2010	11:28:56 AM	SiCl4 pre valve closed
3/8/2010	11:28:56 AM	SiCl4 post valve closed
3/8/2010	11:28:56 AM	Main Vac valve closed
3/8/2010	11:28:56 AM	Bypass valve closed
3/8/2010	11:28:56 AM	Bubbler valve closed
3/8/2010	11:28:56 AM	Helium valve opened
3/8/2010	11:28:56 AM	Helium MFC set to  500.000000
3/8/2010	11:28:56 AM	H2 MFC set to  0.000000
3/8/2010	11:28:56 AM	BCl3 MFC set to  0.000000
3/8/2010	11:28:56 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:28:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:28:56 AM	Tube furnace set to 0
3/8/2010	11:29:03 AM	Helium valve closed
3/8/2010	11:29:03 AM	H2 valve closed
3/8/2010	11:29:03 AM	BCl3 valve closed
3/8/2010	11:29:03 AM	PH3 valve closed
3/8/2010	11:29:03 AM	SiCl4 pre valve closed
3/8/2010	11:29:03 AM	SiCl4 post valve closed
3/8/2010	11:29:03 AM	Main Vac valve closed
3/8/2010	11:29:03 AM	Bypass valve closed
3/8/2010	11:29:03 AM	Bubbler valve closed
3/8/2010	11:29:03 AM	Helium MFC set to  0.000000
3/8/2010	11:29:03 AM	H2 MFC set to  0.000000
3/8/2010	11:29:03 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:03 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:03 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:03 AM	Tube furnace set to 0
3/8/2010	11:29:03 AM	Run finished at 11:29 AM
3/8/2010	11:29:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:29:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:29:12 AM	Recipe started at 11:29 AM
3/8/2010	11:29:12 AM	H2 valve closed
3/8/2010	11:29:12 AM	BCl3 valve closed
3/8/2010	11:29:12 AM	PH3 valve closed
3/8/2010	11:29:12 AM	SiCl4 pre valve closed
3/8/2010	11:29:12 AM	SiCl4 post valve closed
3/8/2010	11:29:12 AM	Main Vac valve closed
3/8/2010	11:29:12 AM	Bypass valve closed
3/8/2010	11:29:12 AM	Bubbler valve closed
3/8/2010	11:29:12 AM	Helium valve opened
3/8/2010	11:29:12 AM	Helium MFC set to  500.000000
3/8/2010	11:29:12 AM	H2 MFC set to  0.000000
3/8/2010	11:29:12 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:12 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:12 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:12 AM	Tube furnace set to 0
3/8/2010	11:29:20 AM	Helium valve closed
3/8/2010	11:29:20 AM	H2 valve closed
3/8/2010	11:29:20 AM	BCl3 valve closed
3/8/2010	11:29:20 AM	PH3 valve closed
3/8/2010	11:29:20 AM	SiCl4 pre valve closed
3/8/2010	11:29:20 AM	SiCl4 post valve closed
3/8/2010	11:29:20 AM	Main Vac valve closed
3/8/2010	11:29:20 AM	Bypass valve closed
3/8/2010	11:29:20 AM	Bubbler valve closed
3/8/2010	11:29:20 AM	Helium MFC set to  0.000000
3/8/2010	11:29:20 AM	H2 MFC set to  0.000000
3/8/2010	11:29:20 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:20 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:20 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:20 AM	Tube furnace set to 0
3/8/2010	11:29:21 AM	Run finished at 11:29 AM
3/8/2010	11:29:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:29:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:29:23 AM	Recipe started at 11:29 AM
3/8/2010	11:29:23 AM	Helium valve closed
3/8/2010	11:29:23 AM	H2 valve closed
3/8/2010	11:29:23 AM	BCl3 valve closed
3/8/2010	11:29:23 AM	PH3 valve closed
3/8/2010	11:29:23 AM	SiCl4 pre valve closed
3/8/2010	11:29:23 AM	SiCl4 post valve closed
3/8/2010	11:29:23 AM	Main Vac valve closed
3/8/2010	11:29:23 AM	Bubbler valve closed
3/8/2010	11:29:23 AM	Bypass valve opened
3/8/2010	11:29:23 AM	Helium MFC set to  0.000000
3/8/2010	11:29:23 AM	H2 MFC set to  0.000000
3/8/2010	11:29:23 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:23 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:23 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:23 AM	Tube furnace set to 0
3/8/2010	11:29:26 AM	Helium valve closed
3/8/2010	11:29:26 AM	H2 valve closed
3/8/2010	11:29:26 AM	BCl3 valve closed
3/8/2010	11:29:26 AM	PH3 valve closed
3/8/2010	11:29:26 AM	SiCl4 pre valve closed
3/8/2010	11:29:26 AM	SiCl4 post valve closed
3/8/2010	11:29:26 AM	Bubbler valve closed
3/8/2010	11:29:26 AM	Main Vac valve opened
3/8/2010	11:29:26 AM	Bypass valve opened
3/8/2010	11:29:26 AM	Helium MFC set to  0.000000
3/8/2010	11:29:26 AM	H2 MFC set to  0.000000
3/8/2010	11:29:26 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:26 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:26 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:26 AM	Tube furnace set to 0
3/8/2010	11:29:27 AM	Run finished at 11:29 AM
3/8/2010	11:29:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:29:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:29:31 AM	Recipe started at 11:29 AM
3/8/2010	11:29:31 AM	H2 valve closed
3/8/2010	11:29:31 AM	BCl3 valve closed
3/8/2010	11:29:31 AM	PH3 valve closed
3/8/2010	11:29:31 AM	SiCl4 pre valve closed
3/8/2010	11:29:31 AM	SiCl4 post valve closed
3/8/2010	11:29:31 AM	Main Vac valve closed
3/8/2010	11:29:31 AM	Bypass valve closed
3/8/2010	11:29:31 AM	Bubbler valve closed
3/8/2010	11:29:31 AM	Helium valve opened
3/8/2010	11:29:31 AM	Helium MFC set to  500.000000
3/8/2010	11:29:31 AM	H2 MFC set to  0.000000
3/8/2010	11:29:31 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:31 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:31 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:31 AM	Tube furnace set to 0
3/8/2010	11:29:47 AM	Helium valve closed
3/8/2010	11:29:47 AM	H2 valve closed
3/8/2010	11:29:47 AM	BCl3 valve closed
3/8/2010	11:29:47 AM	PH3 valve closed
3/8/2010	11:29:47 AM	SiCl4 pre valve closed
3/8/2010	11:29:47 AM	SiCl4 post valve closed
3/8/2010	11:29:47 AM	Main Vac valve closed
3/8/2010	11:29:47 AM	Bypass valve closed
3/8/2010	11:29:47 AM	Bubbler valve closed
3/8/2010	11:29:47 AM	Helium MFC set to  0.000000
3/8/2010	11:29:47 AM	H2 MFC set to  0.000000
3/8/2010	11:29:47 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:47 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:47 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:47 AM	Tube furnace set to 0
3/8/2010	11:29:48 AM	Run finished at 11:29 AM
3/8/2010	11:29:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	11:29:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:29:51 AM	Recipe started at 11:29 AM
3/8/2010	11:29:51 AM	Helium valve closed
3/8/2010	11:29:51 AM	H2 valve closed
3/8/2010	11:29:51 AM	BCl3 valve closed
3/8/2010	11:29:51 AM	PH3 valve closed
3/8/2010	11:29:51 AM	SiCl4 pre valve closed
3/8/2010	11:29:51 AM	SiCl4 post valve closed
3/8/2010	11:29:51 AM	Main Vac valve closed
3/8/2010	11:29:51 AM	Bubbler valve closed
3/8/2010	11:29:51 AM	Bypass valve opened
3/8/2010	11:29:51 AM	Helium MFC set to  0.000000
3/8/2010	11:29:51 AM	H2 MFC set to  0.000000
3/8/2010	11:29:51 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:51 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:51 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:29:51 AM	Tube furnace set to 0
3/8/2010	11:29:53 AM	Run aborted at 11:29 AM
3/8/2010	11:29:53 AM	Helium valve closed
3/8/2010	11:29:53 AM	H2 valve closed
3/8/2010	11:29:53 AM	BCl3 valve closed
3/8/2010	11:29:53 AM	PH3 valve closed
3/8/2010	11:29:53 AM	SiCl4 pre valve closed
3/8/2010	11:29:53 AM	SiCl4 post valve closed
3/8/2010	11:29:53 AM	Bypass valve closed
3/8/2010	11:29:53 AM	Main Vac valve closed
3/8/2010	11:29:53 AM	Bubbler valve closed
3/8/2010	11:29:53 AM	Helium MFC set to  0.000000
3/8/2010	11:29:53 AM	H2 MFC set to  0.000000
3/8/2010	11:29:53 AM	BCl3 MFC set to  0.000000
3/8/2010	11:29:53 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:29:53 AM	Tube furnace set to 0
3/8/2010	11:29:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:30:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	11:30:10 AM	Recipe started at 11:30 AM
3/8/2010	11:30:10 AM	Helium valve closed
3/8/2010	11:30:10 AM	H2 valve closed
3/8/2010	11:30:10 AM	BCl3 valve closed
3/8/2010	11:30:10 AM	PH3 valve closed
3/8/2010	11:30:10 AM	SiCl4 pre valve closed
3/8/2010	11:30:10 AM	SiCl4 post valve closed
3/8/2010	11:30:10 AM	Main Vac valve closed
3/8/2010	11:30:10 AM	Bubbler valve closed
3/8/2010	11:30:10 AM	Bypass valve opened
3/8/2010	11:30:10 AM	Helium MFC set to  0.000000
3/8/2010	11:30:10 AM	H2 MFC set to  0.000000
3/8/2010	11:30:10 AM	BCl3 MFC set to  0.000000
3/8/2010	11:30:10 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:30:10 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:30:10 AM	Tube furnace set to 0
3/8/2010	11:30:20 AM	Helium valve closed
3/8/2010	11:30:20 AM	H2 valve closed
3/8/2010	11:30:20 AM	BCl3 valve closed
3/8/2010	11:30:20 AM	PH3 valve closed
3/8/2010	11:30:20 AM	SiCl4 pre valve closed
3/8/2010	11:30:20 AM	SiCl4 post valve closed
3/8/2010	11:30:20 AM	Bubbler valve closed
3/8/2010	11:30:20 AM	Main Vac valve opened
3/8/2010	11:30:20 AM	Bypass valve opened
3/8/2010	11:30:20 AM	Helium MFC set to  0.000000
3/8/2010	11:30:20 AM	H2 MFC set to  0.000000
3/8/2010	11:30:20 AM	BCl3 MFC set to  0.000000
3/8/2010	11:30:20 AM	SiCl4 MFC set to  0.000000
3/8/2010	11:30:20 AM	Bypass solenoid MFC set to  0.000000
3/8/2010	11:30:20 AM	Tube furnace set to 0
3/8/2010	11:30:20 AM	Run finished at 11:30 AM
3/8/2010	11:30:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	1:14:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	1:14:57 PM	Recipe started at 1:14 PM
3/8/2010	1:14:57 PM	H2 valve closed
3/8/2010	1:14:57 PM	BCl3 valve closed
3/8/2010	1:14:57 PM	PH3 valve closed
3/8/2010	1:14:57 PM	SiCl4 pre valve closed
3/8/2010	1:14:57 PM	SiCl4 post valve closed
3/8/2010	1:14:57 PM	Main Vac valve closed
3/8/2010	1:14:57 PM	Bypass valve closed
3/8/2010	1:14:57 PM	Bubbler valve closed
3/8/2010	1:14:57 PM	Helium valve opened
3/8/2010	1:14:57 PM	Helium MFC set to  500.000000
3/8/2010	1:14:57 PM	H2 MFC set to  0.000000
3/8/2010	1:14:57 PM	BCl3 MFC set to  0.000000
3/8/2010	1:14:57 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:14:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:14:57 PM	Tube furnace set to 0
3/8/2010	1:15:06 PM	Helium valve closed
3/8/2010	1:15:06 PM	H2 valve closed
3/8/2010	1:15:06 PM	BCl3 valve closed
3/8/2010	1:15:06 PM	PH3 valve closed
3/8/2010	1:15:06 PM	SiCl4 pre valve closed
3/8/2010	1:15:06 PM	SiCl4 post valve closed
3/8/2010	1:15:06 PM	Main Vac valve closed
3/8/2010	1:15:06 PM	Bypass valve closed
3/8/2010	1:15:06 PM	Bubbler valve closed
3/8/2010	1:15:06 PM	Helium MFC set to  0.000000
3/8/2010	1:15:06 PM	H2 MFC set to  0.000000
3/8/2010	1:15:06 PM	BCl3 MFC set to  0.000000
3/8/2010	1:15:06 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:15:06 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:15:06 PM	Tube furnace set to 0
3/8/2010	1:15:06 PM	Run finished at 1:15 PM
3/8/2010	1:15:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	1:15:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	1:15:12 PM	Recipe started at 1:15 PM
3/8/2010	1:15:12 PM	Helium valve closed
3/8/2010	1:15:12 PM	H2 valve closed
3/8/2010	1:15:12 PM	BCl3 valve closed
3/8/2010	1:15:12 PM	PH3 valve closed
3/8/2010	1:15:12 PM	SiCl4 pre valve closed
3/8/2010	1:15:12 PM	SiCl4 post valve closed
3/8/2010	1:15:12 PM	Main Vac valve closed
3/8/2010	1:15:12 PM	Bubbler valve closed
3/8/2010	1:15:12 PM	Bypass valve opened
3/8/2010	1:15:12 PM	Helium MFC set to  0.000000
3/8/2010	1:15:12 PM	H2 MFC set to  0.000000
3/8/2010	1:15:12 PM	BCl3 MFC set to  0.000000
3/8/2010	1:15:12 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:15:12 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:15:12 PM	Tube furnace set to 0
3/8/2010	1:15:17 PM	Helium valve closed
3/8/2010	1:15:17 PM	H2 valve closed
3/8/2010	1:15:17 PM	BCl3 valve closed
3/8/2010	1:15:17 PM	PH3 valve closed
3/8/2010	1:15:17 PM	SiCl4 pre valve closed
3/8/2010	1:15:17 PM	SiCl4 post valve closed
3/8/2010	1:15:17 PM	Bubbler valve closed
3/8/2010	1:15:17 PM	Main Vac valve opened
3/8/2010	1:15:17 PM	Bypass valve opened
3/8/2010	1:15:17 PM	Helium MFC set to  0.000000
3/8/2010	1:15:17 PM	H2 MFC set to  0.000000
3/8/2010	1:15:17 PM	BCl3 MFC set to  0.000000
3/8/2010	1:15:17 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:15:17 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:15:17 PM	Tube furnace set to 0
3/8/2010	1:15:17 PM	Run finished at 1:15 PM
3/8/2010	1:15:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	1:20:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	1:20:25 PM	Recipe started at 1:20 PM
3/8/2010	1:20:25 PM	H2 valve closed
3/8/2010	1:20:25 PM	BCl3 valve closed
3/8/2010	1:20:25 PM	PH3 valve closed
3/8/2010	1:20:25 PM	SiCl4 pre valve closed
3/8/2010	1:20:25 PM	SiCl4 post valve closed
3/8/2010	1:20:25 PM	Main Vac valve closed
3/8/2010	1:20:25 PM	Bypass valve closed
3/8/2010	1:20:25 PM	Bubbler valve closed
3/8/2010	1:20:25 PM	Helium valve opened
3/8/2010	1:20:25 PM	Helium MFC set to  500.000000
3/8/2010	1:20:25 PM	H2 MFC set to  0.000000
3/8/2010	1:20:25 PM	BCl3 MFC set to  0.000000
3/8/2010	1:20:25 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:20:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:20:25 PM	Tube furnace set to 0
3/8/2010	1:21:49 PM	Helium valve closed
3/8/2010	1:21:49 PM	H2 valve closed
3/8/2010	1:21:49 PM	BCl3 valve closed
3/8/2010	1:21:49 PM	PH3 valve closed
3/8/2010	1:21:49 PM	SiCl4 pre valve closed
3/8/2010	1:21:49 PM	SiCl4 post valve closed
3/8/2010	1:21:49 PM	Main Vac valve closed
3/8/2010	1:21:49 PM	Bypass valve closed
3/8/2010	1:21:49 PM	Bubbler valve closed
3/8/2010	1:21:49 PM	Helium MFC set to  0.000000
3/8/2010	1:21:49 PM	H2 MFC set to  0.000000
3/8/2010	1:21:49 PM	BCl3 MFC set to  0.000000
3/8/2010	1:21:49 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:21:49 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:21:49 PM	Tube furnace set to 0
3/8/2010	1:21:49 PM	Run finished at 1:21 PM
3/8/2010	1:21:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	1:25:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	1:25:47 PM	Recipe started at 1:25 PM
3/8/2010	1:25:47 PM	Helium valve closed
3/8/2010	1:25:47 PM	H2 valve closed
3/8/2010	1:25:47 PM	BCl3 valve closed
3/8/2010	1:25:47 PM	PH3 valve closed
3/8/2010	1:25:47 PM	SiCl4 pre valve closed
3/8/2010	1:25:47 PM	SiCl4 post valve closed
3/8/2010	1:25:47 PM	Main Vac valve closed
3/8/2010	1:25:47 PM	Bubbler valve closed
3/8/2010	1:25:47 PM	Bypass valve opened
3/8/2010	1:25:47 PM	Helium MFC set to  0.000000
3/8/2010	1:25:47 PM	H2 MFC set to  0.000000
3/8/2010	1:25:47 PM	BCl3 MFC set to  0.000000
3/8/2010	1:25:47 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:25:47 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:25:47 PM	Tube furnace set to 0
3/8/2010	1:26:18 PM	Helium valve closed
3/8/2010	1:26:18 PM	H2 valve closed
3/8/2010	1:26:18 PM	BCl3 valve closed
3/8/2010	1:26:18 PM	PH3 valve closed
3/8/2010	1:26:18 PM	SiCl4 pre valve closed
3/8/2010	1:26:18 PM	SiCl4 post valve closed
3/8/2010	1:26:18 PM	Bubbler valve closed
3/8/2010	1:26:18 PM	Main Vac valve opened
3/8/2010	1:26:18 PM	Bypass valve opened
3/8/2010	1:26:18 PM	Helium MFC set to  0.000000
3/8/2010	1:26:18 PM	H2 MFC set to  0.000000
3/8/2010	1:26:18 PM	BCl3 MFC set to  0.000000
3/8/2010	1:26:18 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:26:18 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:26:18 PM	Tube furnace set to 0
3/8/2010	1:26:19 PM	Run finished at 1:26 PM
3/8/2010	1:26:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	1:28:33 PM	Recipe started at 1:28 PM
3/8/2010	1:28:33 PM	H2 valve closed
3/8/2010	1:28:33 PM	BCl3 valve closed
3/8/2010	1:28:33 PM	PH3 valve closed
3/8/2010	1:28:33 PM	SiCl4 pre valve closed
3/8/2010	1:28:33 PM	SiCl4 post valve closed
3/8/2010	1:28:33 PM	Main Vac valve closed
3/8/2010	1:28:33 PM	Bypass valve closed
3/8/2010	1:28:33 PM	Bubbler valve closed
3/8/2010	1:28:33 PM	Helium valve opened
3/8/2010	1:28:33 PM	Helium MFC set to  500.000000
3/8/2010	1:28:33 PM	H2 MFC set to  0.000000
3/8/2010	1:28:33 PM	BCl3 MFC set to  0.000000
3/8/2010	1:28:33 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:28:33 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:28:33 PM	Tube furnace set to 0
3/8/2010	1:29:56 PM	Helium valve closed
3/8/2010	1:29:56 PM	H2 valve closed
3/8/2010	1:29:56 PM	BCl3 valve closed
3/8/2010	1:29:56 PM	PH3 valve closed
3/8/2010	1:29:56 PM	SiCl4 pre valve closed
3/8/2010	1:29:56 PM	SiCl4 post valve closed
3/8/2010	1:29:56 PM	Main Vac valve closed
3/8/2010	1:29:56 PM	Bypass valve closed
3/8/2010	1:29:56 PM	Bubbler valve closed
3/8/2010	1:29:56 PM	Helium MFC set to  0.000000
3/8/2010	1:29:56 PM	H2 MFC set to  0.000000
3/8/2010	1:29:56 PM	BCl3 MFC set to  0.000000
3/8/2010	1:29:56 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:29:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:29:56 PM	Tube furnace set to 0
3/8/2010	1:30:12 PM	Helium valve closed
3/8/2010	1:30:12 PM	H2 valve closed
3/8/2010	1:30:12 PM	BCl3 valve closed
3/8/2010	1:30:12 PM	PH3 valve closed
3/8/2010	1:30:12 PM	SiCl4 pre valve closed
3/8/2010	1:30:12 PM	SiCl4 post valve closed
3/8/2010	1:30:12 PM	Main Vac valve closed
3/8/2010	1:30:12 PM	Bubbler valve closed
3/8/2010	1:30:12 PM	Bypass valve opened
3/8/2010	1:30:12 PM	Helium MFC set to  0.000000
3/8/2010	1:30:12 PM	H2 MFC set to  0.000000
3/8/2010	1:30:12 PM	BCl3 MFC set to  0.000000
3/8/2010	1:30:12 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:30:12 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:30:12 PM	Tube furnace set to 0
3/8/2010	1:30:34 PM	Helium valve closed
3/8/2010	1:30:34 PM	H2 valve closed
3/8/2010	1:30:34 PM	BCl3 valve closed
3/8/2010	1:30:34 PM	PH3 valve closed
3/8/2010	1:30:34 PM	SiCl4 pre valve closed
3/8/2010	1:30:34 PM	SiCl4 post valve closed
3/8/2010	1:30:34 PM	Bubbler valve closed
3/8/2010	1:30:34 PM	Main Vac valve opened
3/8/2010	1:30:34 PM	Bypass valve opened
3/8/2010	1:30:34 PM	Helium MFC set to  0.000000
3/8/2010	1:30:34 PM	H2 MFC set to  0.000000
3/8/2010	1:30:34 PM	BCl3 MFC set to  0.000000
3/8/2010	1:30:34 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:30:34 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:30:34 PM	Tube furnace set to 0
3/8/2010	1:35:35 PM	H2 valve closed
3/8/2010	1:35:35 PM	BCl3 valve closed
3/8/2010	1:35:35 PM	PH3 valve closed
3/8/2010	1:35:35 PM	SiCl4 pre valve closed
3/8/2010	1:35:35 PM	SiCl4 post valve closed
3/8/2010	1:35:35 PM	Main Vac valve closed
3/8/2010	1:35:35 PM	Bypass valve closed
3/8/2010	1:35:35 PM	Bubbler valve closed
3/8/2010	1:35:35 PM	Helium valve opened
3/8/2010	1:35:35 PM	Helium MFC set to  500.000000
3/8/2010	1:35:35 PM	H2 MFC set to  0.000000
3/8/2010	1:35:35 PM	BCl3 MFC set to  0.000000
3/8/2010	1:35:35 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:35:35 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:35:35 PM	Tube furnace set to 0
3/8/2010	1:36:58 PM	Helium valve closed
3/8/2010	1:36:58 PM	H2 valve closed
3/8/2010	1:36:58 PM	BCl3 valve closed
3/8/2010	1:36:58 PM	PH3 valve closed
3/8/2010	1:36:58 PM	SiCl4 pre valve closed
3/8/2010	1:36:58 PM	SiCl4 post valve closed
3/8/2010	1:36:58 PM	Main Vac valve closed
3/8/2010	1:36:58 PM	Bypass valve closed
3/8/2010	1:36:58 PM	Bubbler valve closed
3/8/2010	1:36:58 PM	Helium MFC set to  0.000000
3/8/2010	1:36:58 PM	H2 MFC set to  0.000000
3/8/2010	1:36:58 PM	BCl3 MFC set to  0.000000
3/8/2010	1:36:58 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:36:58 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:36:58 PM	Tube furnace set to 0
3/8/2010	1:37:13 PM	Helium valve closed
3/8/2010	1:37:13 PM	H2 valve closed
3/8/2010	1:37:13 PM	BCl3 valve closed
3/8/2010	1:37:13 PM	PH3 valve closed
3/8/2010	1:37:13 PM	SiCl4 pre valve closed
3/8/2010	1:37:13 PM	SiCl4 post valve closed
3/8/2010	1:37:13 PM	Main Vac valve closed
3/8/2010	1:37:13 PM	Bubbler valve closed
3/8/2010	1:37:13 PM	Bypass valve opened
3/8/2010	1:37:13 PM	Helium MFC set to  0.000000
3/8/2010	1:37:13 PM	H2 MFC set to  0.000000
3/8/2010	1:37:13 PM	BCl3 MFC set to  0.000000
3/8/2010	1:37:13 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:37:13 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:37:13 PM	Tube furnace set to 0
3/8/2010	1:37:36 PM	Helium valve closed
3/8/2010	1:37:36 PM	H2 valve closed
3/8/2010	1:37:36 PM	BCl3 valve closed
3/8/2010	1:37:36 PM	PH3 valve closed
3/8/2010	1:37:36 PM	SiCl4 pre valve closed
3/8/2010	1:37:36 PM	SiCl4 post valve closed
3/8/2010	1:37:36 PM	Bubbler valve closed
3/8/2010	1:37:36 PM	Main Vac valve opened
3/8/2010	1:37:36 PM	Bypass valve opened
3/8/2010	1:37:36 PM	Helium MFC set to  0.000000
3/8/2010	1:37:36 PM	H2 MFC set to  0.000000
3/8/2010	1:37:36 PM	BCl3 MFC set to  0.000000
3/8/2010	1:37:36 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:37:36 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:37:36 PM	Tube furnace set to 0
3/8/2010	1:42:36 PM	H2 valve closed
3/8/2010	1:42:36 PM	BCl3 valve closed
3/8/2010	1:42:36 PM	PH3 valve closed
3/8/2010	1:42:36 PM	SiCl4 pre valve closed
3/8/2010	1:42:36 PM	SiCl4 post valve closed
3/8/2010	1:42:36 PM	Main Vac valve closed
3/8/2010	1:42:36 PM	Bypass valve closed
3/8/2010	1:42:36 PM	Bubbler valve closed
3/8/2010	1:42:36 PM	Helium valve opened
3/8/2010	1:42:36 PM	Helium MFC set to  500.000000
3/8/2010	1:42:36 PM	H2 MFC set to  0.000000
3/8/2010	1:42:36 PM	BCl3 MFC set to  0.000000
3/8/2010	1:42:36 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:42:36 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:42:36 PM	Tube furnace set to 0
3/8/2010	1:44:00 PM	Helium valve closed
3/8/2010	1:44:00 PM	H2 valve closed
3/8/2010	1:44:00 PM	BCl3 valve closed
3/8/2010	1:44:00 PM	PH3 valve closed
3/8/2010	1:44:00 PM	SiCl4 pre valve closed
3/8/2010	1:44:00 PM	SiCl4 post valve closed
3/8/2010	1:44:00 PM	Main Vac valve closed
3/8/2010	1:44:00 PM	Bypass valve closed
3/8/2010	1:44:00 PM	Bubbler valve closed
3/8/2010	1:44:00 PM	Helium MFC set to  0.000000
3/8/2010	1:44:00 PM	H2 MFC set to  0.000000
3/8/2010	1:44:00 PM	BCl3 MFC set to  0.000000
3/8/2010	1:44:00 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:44:00 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:44:00 PM	Tube furnace set to 0
3/8/2010	1:44:15 PM	Helium valve closed
3/8/2010	1:44:15 PM	H2 valve closed
3/8/2010	1:44:15 PM	BCl3 valve closed
3/8/2010	1:44:15 PM	PH3 valve closed
3/8/2010	1:44:15 PM	SiCl4 pre valve closed
3/8/2010	1:44:15 PM	SiCl4 post valve closed
3/8/2010	1:44:15 PM	Main Vac valve closed
3/8/2010	1:44:15 PM	Bubbler valve closed
3/8/2010	1:44:15 PM	Bypass valve opened
3/8/2010	1:44:15 PM	Helium MFC set to  0.000000
3/8/2010	1:44:15 PM	H2 MFC set to  0.000000
3/8/2010	1:44:15 PM	BCl3 MFC set to  0.000000
3/8/2010	1:44:15 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:44:15 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:44:15 PM	Tube furnace set to 0
3/8/2010	1:44:37 PM	Helium valve closed
3/8/2010	1:44:37 PM	H2 valve closed
3/8/2010	1:44:37 PM	BCl3 valve closed
3/8/2010	1:44:37 PM	PH3 valve closed
3/8/2010	1:44:37 PM	SiCl4 pre valve closed
3/8/2010	1:44:37 PM	SiCl4 post valve closed
3/8/2010	1:44:37 PM	Bubbler valve closed
3/8/2010	1:44:37 PM	Main Vac valve opened
3/8/2010	1:44:37 PM	Bypass valve opened
3/8/2010	1:44:37 PM	Helium MFC set to  0.000000
3/8/2010	1:44:37 PM	H2 MFC set to  0.000000
3/8/2010	1:44:37 PM	BCl3 MFC set to  0.000000
3/8/2010	1:44:37 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:44:37 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:44:37 PM	Tube furnace set to 0
3/8/2010	1:49:37 PM	Helium valve closed
3/8/2010	1:49:37 PM	H2 valve closed
3/8/2010	1:49:37 PM	BCl3 valve closed
3/8/2010	1:49:37 PM	PH3 valve closed
3/8/2010	1:49:37 PM	SiCl4 pre valve closed
3/8/2010	1:49:37 PM	SiCl4 post valve closed
3/8/2010	1:49:37 PM	Bubbler valve closed
3/8/2010	1:49:37 PM	Main Vac valve opened
3/8/2010	1:49:37 PM	Bypass valve opened
3/8/2010	1:49:37 PM	Helium MFC set to  0.000000
3/8/2010	1:49:37 PM	H2 MFC set to  0.000000
3/8/2010	1:49:37 PM	BCl3 MFC set to  0.000000
3/8/2010	1:49:37 PM	SiCl4 MFC set to  0.000000
3/8/2010	1:49:37 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	1:49:37 PM	Tube furnace set to 0
3/8/2010	1:49:39 PM	Run finished at 1:49 PM
3/8/2010	3:01:48 PM	Recipe started at 3:01 PM
3/8/2010	3:01:48 PM	Helium valve closed
3/8/2010	3:01:48 PM	BCl3 valve closed
3/8/2010	3:01:48 PM	PH3 valve closed
3/8/2010	3:01:48 PM	SiCl4 pre valve closed
3/8/2010	3:01:48 PM	SiCl4 post valve closed
3/8/2010	3:01:48 PM	Main Vac valve closed
3/8/2010	3:01:48 PM	Bypass valve closed
3/8/2010	3:01:48 PM	Bubbler valve closed
3/8/2010	3:01:48 PM	H2 valve opened
3/8/2010	3:01:48 PM	Helium MFC set to  0.000000
3/8/2010	3:01:48 PM	H2 MFC set to  500.000000
3/8/2010	3:01:48 PM	BCl3 MFC set to  0.000000
3/8/2010	3:01:48 PM	SiCl4 MFC set to  0.000000
3/8/2010	3:01:48 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	3:01:48 PM	Tube furnace set to 0
3/8/2010	3:03:11 PM	Helium valve closed
3/8/2010	3:03:11 PM	BCl3 valve closed
3/8/2010	3:03:11 PM	PH3 valve closed
3/8/2010	3:03:11 PM	SiCl4 pre valve closed
3/8/2010	3:03:11 PM	SiCl4 post valve closed
3/8/2010	3:03:11 PM	Main Vac valve closed
3/8/2010	3:03:11 PM	Bypass valve closed
3/8/2010	3:03:11 PM	H2 valve opened
3/8/2010	3:03:11 PM	Bubbler valve opened
3/8/2010	3:03:11 PM	Helium MFC set to  0.000000
3/8/2010	3:03:11 PM	H2 MFC set to  500.000000
3/8/2010	3:03:11 PM	BCl3 MFC set to  0.000000
3/8/2010	3:03:11 PM	SiCl4 MFC set to  0.000000
3/8/2010	3:03:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	3:03:11 PM	Tube furnace set to 0
3/8/2010	3:23:12 PM	Helium valve closed
3/8/2010	3:23:12 PM	PH3 valve closed
3/8/2010	3:23:12 PM	Main Vac valve closed
3/8/2010	3:23:12 PM	Bypass valve closed
3/8/2010	3:23:12 PM	H2 valve opened
3/8/2010	3:23:12 PM	BCl3 valve opened
3/8/2010	3:23:12 PM	SiCl4 pre valve opened
3/8/2010	3:23:12 PM	SiCl4 post valve opened
3/8/2010	3:23:12 PM	Bubbler valve opened
3/8/2010	3:23:12 PM	Helium MFC set to  0.000000
3/8/2010	3:23:12 PM	H2 MFC set to  500.000000
3/8/2010	3:23:12 PM	BCl3 MFC set to  35.000000
3/8/2010	3:23:12 PM	SiCl4 MFC set to  325.000000
3/8/2010	3:23:12 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	3:23:12 PM	Tube furnace set to 0
3/8/2010	3:28:12 PM	H2 valve closed
3/8/2010	3:28:12 PM	BCl3 valve closed
3/8/2010	3:28:12 PM	PH3 valve closed
3/8/2010	3:28:12 PM	SiCl4 pre valve closed
3/8/2010	3:28:12 PM	SiCl4 post valve closed
3/8/2010	3:28:12 PM	Main Vac valve closed
3/8/2010	3:28:12 PM	Bypass valve closed
3/8/2010	3:28:12 PM	Helium valve opened
3/8/2010	3:28:12 PM	Bubbler valve opened
3/8/2010	3:28:12 PM	Helium MFC set to  500.000000
3/8/2010	3:28:12 PM	H2 MFC set to  0.000000
3/8/2010	3:28:12 PM	BCl3 MFC set to  0.000000
3/8/2010	3:28:12 PM	SiCl4 MFC set to  0.000000
3/8/2010	3:28:12 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	3:28:12 PM	Tube furnace set to 0
3/8/2010	3:48:12 PM	Helium valve closed
3/8/2010	3:48:12 PM	H2 valve closed
3/8/2010	3:48:12 PM	BCl3 valve closed
3/8/2010	3:48:12 PM	PH3 valve closed
3/8/2010	3:48:12 PM	SiCl4 pre valve closed
3/8/2010	3:48:12 PM	SiCl4 post valve closed
3/8/2010	3:48:12 PM	Main Vac valve closed
3/8/2010	3:48:12 PM	Bypass valve closed
3/8/2010	3:48:12 PM	Bubbler valve closed
3/8/2010	3:48:12 PM	Helium MFC set to  0.000000
3/8/2010	3:48:12 PM	H2 MFC set to  0.000000
3/8/2010	3:48:12 PM	BCl3 MFC set to  0.000000
3/8/2010	3:48:12 PM	SiCl4 MFC set to  0.000000
3/8/2010	3:48:12 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	3:48:12 PM	Tube furnace set to 0
3/8/2010	3:48:13 PM	Run finished at 3:48 PM
3/8/2010	4:22:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	4:22:39 PM	Recipe started at 4:22 PM
3/8/2010	4:22:39 PM	Helium valve closed
3/8/2010	4:22:39 PM	H2 valve closed
3/8/2010	4:22:39 PM	BCl3 valve closed
3/8/2010	4:22:39 PM	PH3 valve closed
3/8/2010	4:22:39 PM	SiCl4 pre valve closed
3/8/2010	4:22:39 PM	SiCl4 post valve closed
3/8/2010	4:22:39 PM	Main Vac valve closed
3/8/2010	4:22:39 PM	Bubbler valve closed
3/8/2010	4:22:39 PM	Bypass valve opened
3/8/2010	4:22:39 PM	Helium MFC set to  0.000000
3/8/2010	4:22:39 PM	H2 MFC set to  0.000000
3/8/2010	4:22:39 PM	BCl3 MFC set to  0.000000
3/8/2010	4:22:39 PM	SiCl4 MFC set to  0.000000
3/8/2010	4:22:39 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	4:22:39 PM	Tube furnace set to 0
3/8/2010	4:23:10 PM	Helium valve closed
3/8/2010	4:23:10 PM	H2 valve closed
3/8/2010	4:23:10 PM	BCl3 valve closed
3/8/2010	4:23:11 PM	PH3 valve closed
3/8/2010	4:23:11 PM	SiCl4 pre valve closed
3/8/2010	4:23:11 PM	SiCl4 post valve closed
3/8/2010	4:23:11 PM	Bubbler valve closed
3/8/2010	4:23:11 PM	Main Vac valve opened
3/8/2010	4:23:11 PM	Bypass valve opened
3/8/2010	4:23:11 PM	Helium MFC set to  0.000000
3/8/2010	4:23:11 PM	H2 MFC set to  0.000000
3/8/2010	4:23:11 PM	BCl3 MFC set to  0.000000
3/8/2010	4:23:11 PM	SiCl4 MFC set to  0.000000
3/8/2010	4:23:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	4:23:11 PM	Tube furnace set to 0
3/8/2010	4:23:11 PM	Run finished at 4:23 PM
3/8/2010	4:23:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	5:42:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	5:42:23 PM	Recipe started at 5:42 PM
3/8/2010	5:42:23 PM	H2 valve closed
3/8/2010	5:42:23 PM	BCl3 valve closed
3/8/2010	5:42:23 PM	PH3 valve closed
3/8/2010	5:42:23 PM	SiCl4 pre valve closed
3/8/2010	5:42:23 PM	SiCl4 post valve closed
3/8/2010	5:42:23 PM	Main Vac valve closed
3/8/2010	5:42:23 PM	Bypass valve closed
3/8/2010	5:42:23 PM	Bubbler valve closed
3/8/2010	5:42:24 PM	Helium valve opened
3/8/2010	5:42:24 PM	Helium MFC set to  500.000000
3/8/2010	5:42:24 PM	H2 MFC set to  0.000000
3/8/2010	5:42:24 PM	BCl3 MFC set to  0.000000
3/8/2010	5:42:24 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:42:24 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:42:24 PM	Tube furnace set to 0
3/8/2010	5:43:47 PM	Helium valve closed
3/8/2010	5:43:47 PM	H2 valve closed
3/8/2010	5:43:47 PM	BCl3 valve closed
3/8/2010	5:43:47 PM	PH3 valve closed
3/8/2010	5:43:47 PM	SiCl4 pre valve closed
3/8/2010	5:43:47 PM	SiCl4 post valve closed
3/8/2010	5:43:47 PM	Main Vac valve closed
3/8/2010	5:43:47 PM	Bypass valve closed
3/8/2010	5:43:47 PM	Bubbler valve closed
3/8/2010	5:43:47 PM	Helium MFC set to  0.000000
3/8/2010	5:43:47 PM	H2 MFC set to  0.000000
3/8/2010	5:43:47 PM	BCl3 MFC set to  0.000000
3/8/2010	5:43:47 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:43:47 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:43:47 PM	Tube furnace set to 0
3/8/2010	5:43:47 PM	Run finished at 5:43 PM
3/8/2010	5:43:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	5:46:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	5:46:01 PM	Recipe started at 5:46 PM
3/8/2010	5:46:01 PM	Helium valve closed
3/8/2010	5:46:01 PM	H2 valve closed
3/8/2010	5:46:01 PM	BCl3 valve closed
3/8/2010	5:46:01 PM	PH3 valve closed
3/8/2010	5:46:01 PM	SiCl4 pre valve closed
3/8/2010	5:46:01 PM	SiCl4 post valve closed
3/8/2010	5:46:01 PM	Main Vac valve closed
3/8/2010	5:46:01 PM	Bubbler valve closed
3/8/2010	5:46:01 PM	Bypass valve opened
3/8/2010	5:46:01 PM	Helium MFC set to  0.000000
3/8/2010	5:46:01 PM	H2 MFC set to  0.000000
3/8/2010	5:46:01 PM	BCl3 MFC set to  0.000000
3/8/2010	5:46:01 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:46:01 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:46:01 PM	Tube furnace set to 0
3/8/2010	5:46:31 PM	Helium valve closed
3/8/2010	5:46:31 PM	H2 valve closed
3/8/2010	5:46:31 PM	BCl3 valve closed
3/8/2010	5:46:31 PM	PH3 valve closed
3/8/2010	5:46:31 PM	SiCl4 pre valve closed
3/8/2010	5:46:31 PM	SiCl4 post valve closed
3/8/2010	5:46:31 PM	Bubbler valve closed
3/8/2010	5:46:31 PM	Main Vac valve opened
3/8/2010	5:46:31 PM	Bypass valve opened
3/8/2010	5:46:31 PM	Helium MFC set to  0.000000
3/8/2010	5:46:31 PM	H2 MFC set to  0.000000
3/8/2010	5:46:31 PM	BCl3 MFC set to  0.000000
3/8/2010	5:46:31 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:46:31 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:46:31 PM	Tube furnace set to 0
3/8/2010	5:46:32 PM	Run finished at 5:46 PM
3/8/2010	5:46:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	5:48:36 PM	Recipe started at 5:48 PM
3/8/2010	5:48:36 PM	H2 valve closed
3/8/2010	5:48:36 PM	BCl3 valve closed
3/8/2010	5:48:36 PM	PH3 valve closed
3/8/2010	5:48:36 PM	SiCl4 pre valve closed
3/8/2010	5:48:36 PM	SiCl4 post valve closed
3/8/2010	5:48:36 PM	Main Vac valve closed
3/8/2010	5:48:36 PM	Bypass valve closed
3/8/2010	5:48:36 PM	Bubbler valve closed
3/8/2010	5:48:36 PM	Helium valve opened
3/8/2010	5:48:36 PM	Helium MFC set to  500.000000
3/8/2010	5:48:36 PM	H2 MFC set to  0.000000
3/8/2010	5:48:36 PM	BCl3 MFC set to  0.000000
3/8/2010	5:48:36 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:48:36 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:48:36 PM	Tube furnace set to 0
3/8/2010	5:49:59 PM	Helium valve closed
3/8/2010	5:49:59 PM	H2 valve closed
3/8/2010	5:49:59 PM	BCl3 valve closed
3/8/2010	5:49:59 PM	PH3 valve closed
3/8/2010	5:50:00 PM	SiCl4 pre valve closed
3/8/2010	5:50:00 PM	SiCl4 post valve closed
3/8/2010	5:50:00 PM	Main Vac valve closed
3/8/2010	5:50:00 PM	Bypass valve closed
3/8/2010	5:50:00 PM	Bubbler valve closed
3/8/2010	5:50:00 PM	Helium MFC set to  0.000000
3/8/2010	5:50:00 PM	H2 MFC set to  0.000000
3/8/2010	5:50:00 PM	BCl3 MFC set to  0.000000
3/8/2010	5:50:00 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:50:00 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:50:00 PM	Tube furnace set to 0
3/8/2010	5:50:15 PM	Helium valve closed
3/8/2010	5:50:15 PM	H2 valve closed
3/8/2010	5:50:15 PM	BCl3 valve closed
3/8/2010	5:50:15 PM	PH3 valve closed
3/8/2010	5:50:15 PM	SiCl4 pre valve closed
3/8/2010	5:50:15 PM	SiCl4 post valve closed
3/8/2010	5:50:15 PM	Main Vac valve closed
3/8/2010	5:50:15 PM	Bubbler valve closed
3/8/2010	5:50:15 PM	Bypass valve opened
3/8/2010	5:50:15 PM	Helium MFC set to  0.000000
3/8/2010	5:50:15 PM	H2 MFC set to  0.000000
3/8/2010	5:50:15 PM	BCl3 MFC set to  0.000000
3/8/2010	5:50:15 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:50:15 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:50:15 PM	Tube furnace set to 0
3/8/2010	5:50:37 PM	Helium valve closed
3/8/2010	5:50:37 PM	H2 valve closed
3/8/2010	5:50:37 PM	BCl3 valve closed
3/8/2010	5:50:37 PM	PH3 valve closed
3/8/2010	5:50:37 PM	SiCl4 pre valve closed
3/8/2010	5:50:37 PM	SiCl4 post valve closed
3/8/2010	5:50:37 PM	Bubbler valve closed
3/8/2010	5:50:37 PM	Main Vac valve opened
3/8/2010	5:50:37 PM	Bypass valve opened
3/8/2010	5:50:37 PM	Helium MFC set to  0.000000
3/8/2010	5:50:37 PM	H2 MFC set to  0.000000
3/8/2010	5:50:37 PM	BCl3 MFC set to  0.000000
3/8/2010	5:50:37 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:50:37 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:50:37 PM	Tube furnace set to 0
3/8/2010	5:55:38 PM	H2 valve closed
3/8/2010	5:55:38 PM	BCl3 valve closed
3/8/2010	5:55:38 PM	PH3 valve closed
3/8/2010	5:55:38 PM	SiCl4 pre valve closed
3/8/2010	5:55:38 PM	SiCl4 post valve closed
3/8/2010	5:55:38 PM	Main Vac valve closed
3/8/2010	5:55:38 PM	Bypass valve closed
3/8/2010	5:55:38 PM	Bubbler valve closed
3/8/2010	5:55:38 PM	Helium valve opened
3/8/2010	5:55:38 PM	Helium MFC set to  500.000000
3/8/2010	5:55:38 PM	H2 MFC set to  0.000000
3/8/2010	5:55:38 PM	BCl3 MFC set to  0.000000
3/8/2010	5:55:38 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:55:38 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:55:38 PM	Tube furnace set to 0
3/8/2010	5:57:01 PM	Helium valve closed
3/8/2010	5:57:01 PM	H2 valve closed
3/8/2010	5:57:01 PM	BCl3 valve closed
3/8/2010	5:57:01 PM	PH3 valve closed
3/8/2010	5:57:01 PM	SiCl4 pre valve closed
3/8/2010	5:57:01 PM	SiCl4 post valve closed
3/8/2010	5:57:01 PM	Main Vac valve closed
3/8/2010	5:57:01 PM	Bypass valve closed
3/8/2010	5:57:01 PM	Bubbler valve closed
3/8/2010	5:57:01 PM	Helium MFC set to  0.000000
3/8/2010	5:57:01 PM	H2 MFC set to  0.000000
3/8/2010	5:57:01 PM	BCl3 MFC set to  0.000000
3/8/2010	5:57:01 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:57:01 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:57:01 PM	Tube furnace set to 0
3/8/2010	5:57:16 PM	Helium valve closed
3/8/2010	5:57:16 PM	H2 valve closed
3/8/2010	5:57:16 PM	BCl3 valve closed
3/8/2010	5:57:16 PM	PH3 valve closed
3/8/2010	5:57:16 PM	SiCl4 pre valve closed
3/8/2010	5:57:16 PM	SiCl4 post valve closed
3/8/2010	5:57:16 PM	Main Vac valve closed
3/8/2010	5:57:16 PM	Bubbler valve closed
3/8/2010	5:57:16 PM	Bypass valve opened
3/8/2010	5:57:16 PM	Helium MFC set to  0.000000
3/8/2010	5:57:16 PM	H2 MFC set to  0.000000
3/8/2010	5:57:16 PM	BCl3 MFC set to  0.000000
3/8/2010	5:57:16 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:57:16 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:57:16 PM	Tube furnace set to 0
3/8/2010	5:57:38 PM	Helium valve closed
3/8/2010	5:57:38 PM	H2 valve closed
3/8/2010	5:57:38 PM	BCl3 valve closed
3/8/2010	5:57:39 PM	PH3 valve closed
3/8/2010	5:57:39 PM	SiCl4 pre valve closed
3/8/2010	5:57:39 PM	SiCl4 post valve closed
3/8/2010	5:57:39 PM	Bubbler valve closed
3/8/2010	5:57:39 PM	Main Vac valve opened
3/8/2010	5:57:39 PM	Bypass valve opened
3/8/2010	5:57:39 PM	Helium MFC set to  0.000000
3/8/2010	5:57:39 PM	H2 MFC set to  0.000000
3/8/2010	5:57:39 PM	BCl3 MFC set to  0.000000
3/8/2010	5:57:39 PM	SiCl4 MFC set to  0.000000
3/8/2010	5:57:39 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	5:57:39 PM	Tube furnace set to 0
3/8/2010	6:02:39 PM	H2 valve closed
3/8/2010	6:02:39 PM	BCl3 valve closed
3/8/2010	6:02:39 PM	PH3 valve closed
3/8/2010	6:02:39 PM	SiCl4 pre valve closed
3/8/2010	6:02:39 PM	SiCl4 post valve closed
3/8/2010	6:02:39 PM	Main Vac valve closed
3/8/2010	6:02:39 PM	Bypass valve closed
3/8/2010	6:02:39 PM	Bubbler valve closed
3/8/2010	6:02:39 PM	Helium valve opened
3/8/2010	6:02:39 PM	Helium MFC set to  500.000000
3/8/2010	6:02:39 PM	H2 MFC set to  0.000000
3/8/2010	6:02:39 PM	BCl3 MFC set to  0.000000
3/8/2010	6:02:39 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:02:39 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:02:39 PM	Tube furnace set to 0
3/8/2010	6:04:02 PM	Helium valve closed
3/8/2010	6:04:02 PM	H2 valve closed
3/8/2010	6:04:02 PM	BCl3 valve closed
3/8/2010	6:04:02 PM	PH3 valve closed
3/8/2010	6:04:02 PM	SiCl4 pre valve closed
3/8/2010	6:04:02 PM	SiCl4 post valve closed
3/8/2010	6:04:02 PM	Main Vac valve closed
3/8/2010	6:04:02 PM	Bypass valve closed
3/8/2010	6:04:02 PM	Bubbler valve closed
3/8/2010	6:04:02 PM	Helium MFC set to  0.000000
3/8/2010	6:04:02 PM	H2 MFC set to  0.000000
3/8/2010	6:04:02 PM	BCl3 MFC set to  0.000000
3/8/2010	6:04:02 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:04:02 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:04:02 PM	Tube furnace set to 0
3/8/2010	6:04:17 PM	Helium valve closed
3/8/2010	6:04:17 PM	H2 valve closed
3/8/2010	6:04:17 PM	BCl3 valve closed
3/8/2010	6:04:17 PM	PH3 valve closed
3/8/2010	6:04:17 PM	SiCl4 pre valve closed
3/8/2010	6:04:17 PM	SiCl4 post valve closed
3/8/2010	6:04:17 PM	Main Vac valve closed
3/8/2010	6:04:17 PM	Bubbler valve closed
3/8/2010	6:04:17 PM	Bypass valve opened
3/8/2010	6:04:17 PM	Helium MFC set to  0.000000
3/8/2010	6:04:17 PM	H2 MFC set to  0.000000
3/8/2010	6:04:17 PM	BCl3 MFC set to  0.000000
3/8/2010	6:04:17 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:04:17 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:04:17 PM	Tube furnace set to 0
3/8/2010	6:04:40 PM	Helium valve closed
3/8/2010	6:04:40 PM	H2 valve closed
3/8/2010	6:04:40 PM	BCl3 valve closed
3/8/2010	6:04:40 PM	PH3 valve closed
3/8/2010	6:04:40 PM	SiCl4 pre valve closed
3/8/2010	6:04:40 PM	SiCl4 post valve closed
3/8/2010	6:04:40 PM	Bubbler valve closed
3/8/2010	6:04:40 PM	Main Vac valve opened
3/8/2010	6:04:40 PM	Bypass valve opened
3/8/2010	6:04:40 PM	Helium MFC set to  0.000000
3/8/2010	6:04:40 PM	H2 MFC set to  0.000000
3/8/2010	6:04:40 PM	BCl3 MFC set to  0.000000
3/8/2010	6:04:40 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:04:40 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:04:40 PM	Tube furnace set to 0
3/8/2010	6:09:40 PM	Helium valve closed
3/8/2010	6:09:40 PM	H2 valve closed
3/8/2010	6:09:40 PM	BCl3 valve closed
3/8/2010	6:09:40 PM	PH3 valve closed
3/8/2010	6:09:40 PM	SiCl4 pre valve closed
3/8/2010	6:09:40 PM	SiCl4 post valve closed
3/8/2010	6:09:40 PM	Bubbler valve closed
3/8/2010	6:09:40 PM	Main Vac valve opened
3/8/2010	6:09:40 PM	Bypass valve opened
3/8/2010	6:09:40 PM	Helium MFC set to  0.000000
3/8/2010	6:09:40 PM	H2 MFC set to  0.000000
3/8/2010	6:09:40 PM	BCl3 MFC set to  0.000000
3/8/2010	6:09:40 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:09:40 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:09:40 PM	Tube furnace set to 0
3/8/2010	6:09:41 PM	Run finished at 6:09 PM
3/8/2010	6:18:59 PM	Bypass valve closed
3/8/2010	6:19:00 PM	Main Vac valve closed
3/8/2010	6:19:12 PM	Bypass valve opened
3/8/2010	6:19:12 PM	Main Vac valve opened
3/8/2010	6:19:54 PM	Recipe started at 6:19 PM
3/8/2010	6:19:54 PM	Helium valve closed
3/8/2010	6:19:54 PM	BCl3 valve closed
3/8/2010	6:19:54 PM	PH3 valve closed
3/8/2010	6:19:54 PM	SiCl4 pre valve closed
3/8/2010	6:19:54 PM	SiCl4 post valve closed
3/8/2010	6:19:54 PM	Main Vac valve closed
3/8/2010	6:19:54 PM	Bypass valve closed
3/8/2010	6:19:54 PM	Bubbler valve closed
3/8/2010	6:19:54 PM	H2 valve opened
3/8/2010	6:19:54 PM	Helium MFC set to  0.000000
3/8/2010	6:19:54 PM	H2 MFC set to  500.000000
3/8/2010	6:19:54 PM	BCl3 MFC set to  0.000000
3/8/2010	6:19:54 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:19:54 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:19:54 PM	Tube furnace set to 0
3/8/2010	6:21:19 PM	Helium valve closed
3/8/2010	6:21:19 PM	BCl3 valve closed
3/8/2010	6:21:19 PM	PH3 valve closed
3/8/2010	6:21:19 PM	SiCl4 pre valve closed
3/8/2010	6:21:19 PM	SiCl4 post valve closed
3/8/2010	6:21:19 PM	Main Vac valve closed
3/8/2010	6:21:19 PM	Bypass valve closed
3/8/2010	6:21:19 PM	H2 valve opened
3/8/2010	6:21:19 PM	Bubbler valve opened
3/8/2010	6:21:19 PM	Helium MFC set to  0.000000
3/8/2010	6:21:19 PM	H2 MFC set to  500.000000
3/8/2010	6:21:19 PM	BCl3 MFC set to  0.000000
3/8/2010	6:21:19 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:21:19 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:21:19 PM	Tube furnace set to 0
3/8/2010	6:41:19 PM	Helium valve closed
3/8/2010	6:41:19 PM	PH3 valve closed
3/8/2010	6:41:19 PM	Main Vac valve closed
3/8/2010	6:41:19 PM	Bypass valve closed
3/8/2010	6:41:19 PM	H2 valve opened
3/8/2010	6:41:19 PM	BCl3 valve opened
3/8/2010	6:41:19 PM	SiCl4 pre valve opened
3/8/2010	6:41:19 PM	SiCl4 post valve opened
3/8/2010	6:41:19 PM	Bubbler valve opened
3/8/2010	6:41:19 PM	Helium MFC set to  0.000000
3/8/2010	6:41:19 PM	H2 MFC set to  500.000000
3/8/2010	6:41:19 PM	BCl3 MFC set to  15.000000
3/8/2010	6:41:19 PM	SiCl4 MFC set to  325.000000
3/8/2010	6:41:19 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:41:19 PM	Tube furnace set to 0
3/8/2010	6:46:19 PM	H2 valve closed
3/8/2010	6:46:19 PM	BCl3 valve closed
3/8/2010	6:46:19 PM	PH3 valve closed
3/8/2010	6:46:19 PM	SiCl4 pre valve closed
3/8/2010	6:46:19 PM	SiCl4 post valve closed
3/8/2010	6:46:19 PM	Main Vac valve closed
3/8/2010	6:46:19 PM	Bypass valve closed
3/8/2010	6:46:19 PM	Helium valve opened
3/8/2010	6:46:19 PM	Bubbler valve opened
3/8/2010	6:46:19 PM	Helium MFC set to  500.000000
3/8/2010	6:46:19 PM	H2 MFC set to  0.000000
3/8/2010	6:46:19 PM	BCl3 MFC set to  0.000000
3/8/2010	6:46:19 PM	SiCl4 MFC set to  0.000000
3/8/2010	6:46:19 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	6:46:19 PM	Tube furnace set to 0
3/8/2010	7:06:20 PM	Helium valve closed
3/8/2010	7:06:20 PM	H2 valve closed
3/8/2010	7:06:20 PM	BCl3 valve closed
3/8/2010	7:06:20 PM	PH3 valve closed
3/8/2010	7:06:20 PM	SiCl4 pre valve closed
3/8/2010	7:06:20 PM	SiCl4 post valve closed
3/8/2010	7:06:20 PM	Main Vac valve closed
3/8/2010	7:06:20 PM	Bypass valve closed
3/8/2010	7:06:20 PM	Bubbler valve closed
3/8/2010	7:06:20 PM	Helium MFC set to  0.000000
3/8/2010	7:06:20 PM	H2 MFC set to  0.000000
3/8/2010	7:06:20 PM	BCl3 MFC set to  0.000000
3/8/2010	7:06:20 PM	SiCl4 MFC set to  0.000000
3/8/2010	7:06:20 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	7:06:20 PM	Tube furnace set to 0
3/8/2010	7:06:20 PM	Run finished at 7:06 PM
3/8/2010	7:10:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	7:10:49 PM	Recipe started at 7:10 PM
3/8/2010	7:10:49 PM	Helium valve closed
3/8/2010	7:10:49 PM	H2 valve closed
3/8/2010	7:10:49 PM	BCl3 valve closed
3/8/2010	7:10:49 PM	PH3 valve closed
3/8/2010	7:10:49 PM	SiCl4 pre valve closed
3/8/2010	7:10:49 PM	SiCl4 post valve closed
3/8/2010	7:10:49 PM	Main Vac valve closed
3/8/2010	7:10:49 PM	Bubbler valve closed
3/8/2010	7:10:49 PM	Bypass valve opened
3/8/2010	7:10:49 PM	Helium MFC set to  0.000000
3/8/2010	7:10:49 PM	H2 MFC set to  0.000000
3/8/2010	7:10:49 PM	BCl3 MFC set to  0.000000
3/8/2010	7:10:49 PM	SiCl4 MFC set to  0.000000
3/8/2010	7:10:49 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	7:10:49 PM	Tube furnace set to 0
3/8/2010	7:11:19 PM	Helium valve closed
3/8/2010	7:11:19 PM	H2 valve closed
3/8/2010	7:11:19 PM	BCl3 valve closed
3/8/2010	7:11:19 PM	PH3 valve closed
3/8/2010	7:11:19 PM	SiCl4 pre valve closed
3/8/2010	7:11:19 PM	SiCl4 post valve closed
3/8/2010	7:11:19 PM	Bubbler valve closed
3/8/2010	7:11:19 PM	Main Vac valve opened
3/8/2010	7:11:19 PM	Bypass valve opened
3/8/2010	7:11:19 PM	Helium MFC set to  0.000000
3/8/2010	7:11:19 PM	H2 MFC set to  0.000000
3/8/2010	7:11:19 PM	BCl3 MFC set to  0.000000
3/8/2010	7:11:19 PM	SiCl4 MFC set to  0.000000
3/8/2010	7:11:19 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	7:11:19 PM	Tube furnace set to 0
3/8/2010	7:11:20 PM	Run finished at 7:11 PM
3/8/2010	7:11:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	10:40:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:40:03 PM	Recipe started at 10:40 PM
3/8/2010	10:40:03 PM	H2 valve closed
3/8/2010	10:40:03 PM	BCl3 valve closed
3/8/2010	10:40:03 PM	PH3 valve closed
3/8/2010	10:40:03 PM	SiCl4 pre valve closed
3/8/2010	10:40:03 PM	SiCl4 post valve closed
3/8/2010	10:40:03 PM	Main Vac valve closed
3/8/2010	10:40:03 PM	Bypass valve closed
3/8/2010	10:40:03 PM	Bubbler valve closed
3/8/2010	10:40:03 PM	Helium valve opened
3/8/2010	10:40:03 PM	Helium MFC set to  500.000000
3/8/2010	10:40:03 PM	H2 MFC set to  0.000000
3/8/2010	10:40:03 PM	BCl3 MFC set to  0.000000
3/8/2010	10:40:03 PM	SiCl4 MFC set to  0.000000
3/8/2010	10:40:03 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:40:03 PM	Tube furnace set to 0
3/8/2010	10:41:27 PM	Helium valve closed
3/8/2010	10:41:27 PM	H2 valve closed
3/8/2010	10:41:27 PM	BCl3 valve closed
3/8/2010	10:41:27 PM	PH3 valve closed
3/8/2010	10:41:27 PM	SiCl4 pre valve closed
3/8/2010	10:41:27 PM	SiCl4 post valve closed
3/8/2010	10:41:27 PM	Main Vac valve closed
3/8/2010	10:41:27 PM	Bypass valve closed
3/8/2010	10:41:27 PM	Bubbler valve closed
3/8/2010	10:41:27 PM	Helium MFC set to  0.000000
3/8/2010	10:41:27 PM	H2 MFC set to  0.000000
3/8/2010	10:41:27 PM	BCl3 MFC set to  0.000000
3/8/2010	10:41:27 PM	SiCl4 MFC set to  0.000000
3/8/2010	10:41:27 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:41:27 PM	Tube furnace set to 0
3/8/2010	10:41:27 PM	Run finished at 10:41 PM
3/8/2010	10:41:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2010	10:44:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2010	10:44:31 PM	Recipe started at 10:44 PM
3/8/2010	10:44:31 PM	Helium valve closed
3/8/2010	10:44:31 PM	H2 valve closed
3/8/2010	10:44:31 PM	BCl3 valve closed
3/8/2010	10:44:31 PM	PH3 valve closed
3/8/2010	10:44:31 PM	SiCl4 pre valve closed
3/8/2010	10:44:31 PM	SiCl4 post valve closed
3/8/2010	10:44:31 PM	Main Vac valve closed
3/8/2010	10:44:31 PM	Bubbler valve closed
3/8/2010	10:44:31 PM	Bypass valve opened
3/8/2010	10:44:31 PM	Helium MFC set to  0.000000
3/8/2010	10:44:31 PM	H2 MFC set to  0.000000
3/8/2010	10:44:31 PM	BCl3 MFC set to  0.000000
3/8/2010	10:44:31 PM	SiCl4 MFC set to  0.000000
3/8/2010	10:44:31 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:44:31 PM	Tube furnace set to 0
3/8/2010	10:45:02 PM	Helium valve closed
3/8/2010	10:45:02 PM	H2 valve closed
3/8/2010	10:45:02 PM	BCl3 valve closed
3/8/2010	10:45:02 PM	PH3 valve closed
3/8/2010	10:45:02 PM	SiCl4 pre valve closed
3/8/2010	10:45:02 PM	SiCl4 post valve closed
3/8/2010	10:45:02 PM	Bubbler valve closed
3/8/2010	10:45:02 PM	Main Vac valve opened
3/8/2010	10:45:02 PM	Bypass valve opened
3/8/2010	10:45:02 PM	Helium MFC set to  0.000000
3/8/2010	10:45:02 PM	H2 MFC set to  0.000000
3/8/2010	10:45:02 PM	BCl3 MFC set to  0.000000
3/8/2010	10:45:02 PM	SiCl4 MFC set to  0.000000
3/8/2010	10:45:02 PM	Bypass solenoid MFC set to  0.000000
3/8/2010	10:45:02 PM	Tube furnace set to 0
3/8/2010	10:45:02 PM	Run finished at 10:45 PM
3/8/2010	10:45:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
